Improved throughput of deep high-aspect-ratio trenches using split-beam laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6261 II, Issue , 2006, Pages

  Braun, David M ^a   Gu, Jianhui ^b   Oram, Richard J ^a  

^a HEWLETT PACKARD COMPANY   (United States)

^b Hewlett Packard Singapore (Private) Limited   (Singapore)

Author keywords

Laser ablation; Shoulder formation; Silicon; Split beam; Trench

Indexed keywords

BEAM SPLITTING OPTICS; PULSE WIDTH LASER; SHOULDER FORMATION; SPLIT-BEAM; TRENCH;

ASPECT RATIO; GALVANOMETERS; MIRRORS; OPTICAL BEAM SPLITTERS; PRISMS; SILICON;

LASER ABLATION;

EID: 33747349243     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.668609     Document Type: Conference Paper

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