Excimer laser processing of novel materials for optoelectronic and spintronic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6458, Issue , 2007, Pages

  Tabbal, Malek ^a,b   Aziz, Michael J ^b   Madi, Charbel ^a,b   Charnvanichborikarn, Supakit ^c   Williams, James S ^c   Christidis, Theodore C ^a  

^a AMERICAN UNIVERSITY OF BEIRUT   (Lebanon)

^b HARVARD UNIVERSITY   (United States)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Black silicon; Chromium oxide; Excimer laser; Laser ablation; Laser annealing; PLD; PLM; Sulfur doping

Indexed keywords

BLACK SILICON; CHROMIUM OXIDE; LASER ANNEALING; PLM; SULFUR DOPING;

LASER ABLATION; LASER BEAMS; MAGNETOELECTRONICS; OPTOELECTRONIC DEVICES; PULSED LASER DEPOSITION; SILICON ALLOYS; THIN FILMS;

EXCIMER LASERS;

EID: 34248384466     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.716788     Document Type: Conference Paper

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