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Volumn 129, Issue 1, 2007, Pages 27-36

Change in radiative optical properties of Ta2O5 thin films due to high-temperature heat treatment

Author keywords

High temperature; Infrared reflectance; Interfacial layer; Optical constants

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; HIGH TEMPERATURE EFFECTS; OPTICAL PROPERTIES; OPTIMIZATION; REFLECTION; REFLECTOMETERS;

EID: 34248343857     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2401195     Document Type: Article
Times cited : (11)

References (23)
  • 2
    • 0037899133 scopus 로고    scopus 로고
    • Micropower Generation Using Combustion: Issues and Approaches
    • Fernandez-Pello, A. C., 2002, "Micropower Generation Using Combustion: Issues and Approaches," Proc. Combust. Inst., 29, p. 883.
    • (2002) Proc. Combust. Inst , vol.29 , pp. 883
    • Fernandez-Pello, A.C.1
  • 5
    • 33645655873 scopus 로고    scopus 로고
    • Deposition of Multilayer IR Reflective Layers with Controlled Thickness on Lamp Bulbs
    • Jpn. Kokai Tokkyo Koho, Tokyo, Japan
    • Obata, Y., and Hashimoto, N., 2002, Deposition of Multilayer IR Reflective Layers with Controlled Thickness on Lamp Bulbs, Jpn. Kokai Tokkyo Koho, Tokyo, Japan.
    • (2002)
    • Obata, Y.1    Hashimoto, N.2
  • 6
    • 0000892720 scopus 로고    scopus 로고
    • Dielectric Function of Amorphous Tantalum Oxide from the Far Infrared to the Deep Ultraviolet Spectral Region Measured by Spectroscopic Ellipsometry
    • Franke, E., Trimble, C. L., Devries, M. J., Woollam, J. A., Schubert. M., and Frost, F., 2000, "Dielectric Function of Amorphous Tantalum Oxide from the Far Infrared to the Deep Ultraviolet Spectral Region Measured by Spectroscopic Ellipsometry," J. Appl. Phys.. 88(9), pp. 5166-5174.
    • (2000) J. Appl. Phys , vol.88 , Issue.9 , pp. 5166-5174
    • Franke, E.1    Trimble, C.L.2    Devries, M.J.3    Woollam, J.A.4    Schubert, M.5    Frost, F.6
  • 8
    • 0034498076 scopus 로고    scopus 로고
    • Formation of Silicon Dioxide Layers During UV Annealing of Tantalum Pentoxide
    • Zhang, J. Y., and Boyd, I. W., 2000, "Formation of Silicon Dioxide Layers During UV Annealing of Tantalum Pentoxide," Appl. Surf. Sci., 168, pp. 312-315.
    • (2000) Appl. Surf. Sci , vol.168 , pp. 312-315
    • Zhang, J.Y.1    Boyd, I.W.2
  • 11
    • 0029405803 scopus 로고
    • Fourier Transform Infrared System Measurements of the Bi-directional Reflectivity of Diffuse and Grooved Surfaces
    • Ford, J. N., Tang, K., and Buckius, R. O., 1995, "Fourier Transform Infrared System Measurements of the Bi-directional Reflectivity of Diffuse and Grooved Surfaces," J. Heat Transfer, 117, pp. 955-962.
    • (1995) J. Heat Transfer , vol.117 , pp. 955-962
    • Ford, J.N.1    Tang, K.2    Buckius, R.O.3
  • 12
    • 33645657116 scopus 로고    scopus 로고
    • An Experimental Theoretical and Numerical Investigation of Directional Scattering from Configured Surfaces,
    • M.S. thesis, University of Illinois, Urbana, IL
    • Kawka, P., 2000, "An Experimental Theoretical and Numerical Investigation of Directional Scattering from Configured Surfaces," M.S. thesis, University of Illinois, Urbana, IL.
    • (2000)
    • Kawka, P.1
  • 14
    • 77956976788 scopus 로고
    • Methods for Determining Optical Parameters of Thin Films
    • Abeles, F., 1963, "Methods for Determining Optical Parameters of Thin Films," Prog. Opt., 2, pp. 251-288.
    • (1963) Prog. Opt , vol.2 , pp. 251-288
    • Abeles, F.1
  • 15
    • 0026817476 scopus 로고    scopus 로고
    • Hopfe, V., Bussemer, P., Rlchter, E., and Klobes, P., 1992, p- and s-Polarized FTIR Reflectance Spectroscopy at Oblique Incidence by Kramers-Kronig Transformation, J. Phys. D, 25, 288-294.
    • Hopfe, V., Bussemer, P., Rlchter, E., and Klobes, P., 1992, "p- and s-Polarized FTIR Reflectance Spectroscopy at Oblique Incidence by Kramers-Kronig Transformation," J. Phys. D, 25, 288-294.
  • 17
    • 84964389892 scopus 로고
    • Variable metric method for minimization
    • Davidon, W., 1959. "Variable metric method for minimization," SIAM J. Optim., 1(1), pp. 1-17.
    • (1959) SIAM J. Optim , vol.1 , Issue.1 , pp. 1-17
    • Davidon, W.1
  • 18
    • 0020204060 scopus 로고
    • Automatic Determination of the Optical Constant of Inhomogeneous Thin Films
    • Borgogno, J. P., Lazarides, B., and Pelletier, E., 1982, "Automatic Determination of the Optical Constant of Inhomogeneous Thin Films," Appl. Opt., 21(22), pp. 4020-4029.
    • (1982) Appl. Opt , vol.21 , Issue.22 , pp. 4020-4029
    • Borgogno, J.P.1    Lazarides, B.2    Pelletier, E.3
  • 19
    • 84975635793 scopus 로고
    • Two-Step Regression Procedure for the Optical Characterization of Thin Films
    • Babu, S. V., David, M., and Patel, R. C., 1991, "Two-Step Regression Procedure for the Optical Characterization of Thin Films," Appl. Opt., 30(7), pp. 839-846.
    • (1991) Appl. Opt , vol.30 , Issue.7 , pp. 839-846
    • Babu, S.V.1    David, M.2    Patel, R.C.3
  • 20
    • 0010041983 scopus 로고    scopus 로고
    • Interphase in Plasma-Deposited Films on Plastics: Effect on the Spectral Properties of Optical Filters
    • Poitras, D., and Martinu, L., 2000, "Interphase in Plasma-Deposited Films on Plastics: Effect on the Spectral Properties of Optical Filters," Appl. Opt., 39(7), pp. 1168-1173.
    • (2000) Appl. Opt , vol.39 , Issue.7 , pp. 1168-1173
    • Poitras, D.1    Martinu, L.2
  • 21
    • 0021422501 scopus 로고
    • Some Properties of Crystallized Tantalum Pentoxide Thin Films on Silicon
    • Oehrlein, G. S., d'Heurle, F. M., and Reisman, A., 1984, "Some Properties of Crystallized Tantalum Pentoxide Thin Films on Silicon," J. Appl. Phys., 55, pp. 3715-3725.
    • (1984) J. Appl. Phys , vol.55 , pp. 3715-3725
    • Oehrlein, G.S.1    d'Heurle, F.M.2    Reisman, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.