SCOPUS 정보 검색 플랫폼

Volumn 88, Issue 9, 2000, Pages 5166-5174

Dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry

(6) Franke, Eva a Trimble, C L a DeVries, M J a Woollam, J A a Schubert, M a,b Frost, F c

a UNIVERSITY OF NEBRASKA LINCOLN (United States)

b Institute of Experimental Physics I (Germany)

c Inst F Oberflachenmodifizierung L (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000892720 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1313784 Document Type: Article

Times cited : (87)

References (52)

1
- 0027684648
- A. J. Waldorf, J. A. Dobrowolski, B. T. Sullivan, and L. M. Plante, Appl. Opt. 32, 5583 (1993).
- (1993) Appl. Opt. , vol.32 , pp. 5583
- Waldorf, A.J.¹ Dobrowolski, J.A.² Sullivan, B.T.³ Plante, L.M.⁴

2
- 0001539014
- F. Rubio, J. M. Albella, J. Denis, and J. M. Martinez-Duart, J. Vac. Sci. Technol. 21, 1043 (1982).
- (1982) J. Vac. Sci. Technol. , vol.21 , pp. 1043
- Rubio, F.¹ Albella, J.M.² Denis, J.³ Martinez-Duart, J.M.⁴

3
- 0018443063
- W. M. Paulson, F. S. Hickernell, and R. L. Davis, J. Vac. Sci. Technol. 16, 307 (1979).
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 307
- Paulson, W.M.¹ Hickernell, F.S.² Davis, R.L.³

4
- 0032661442
- I. Proqueras, J. Marti, and E. Bertran, Thin Solid Films 343, 449 (1999).
- (1999) Thin Solid Films , vol.343 , pp. 449
- Proqueras, I.¹ Marti, J.² Bertran, E.³

5
- 0026852641
- M. Kitao, H. Akram, K. Urabe, and S. Yamada, J. Electron. Mater. 21, 419 (1992).
- (1992) J. Electron. Mater. , vol.21 , pp. 419
- Kitao, M.¹ Akram, H.² Urabe, K.³ Yamada, S.⁴

6
- 0032606526
- P. C. Joshi and M. W. Cole, J. Appl. Phys. 86, 871 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 871
- Joshi, P.C.¹ Cole, M.W.²

7
- 0001650208
- A. Pignolet, G. M. Rao, and S. B. Krupanidhi, Thin Solid Films 258, 230 (1995).
- (1995) Thin Solid Films , vol.258 , pp. 230
- Pignolet, A.¹ Rao, G.M.² Krupanidhi, S.B.³

8
- 0032626840
- S. Ezhilvalavan and T. Y. Tseng, J. Am. Ceram. Soc. 82, 600 (1999).
- (1999) J. Am. Ceram. Soc. , vol.82 , pp. 600
- Ezhilvalavan, S.¹ Tseng, T.Y.²

9
- 0026624261
- S. W. Park and H. B. Im, Thin Solid Films 207, 258 (1992).
- (1992) Thin Solid Films , vol.207 , pp. 258
- Park, S.W.¹ Im, H.B.²

10
- 0032534442
- V. Mikhaelashvili, Y. Betzer, I. Prudnikov, M. Orenstein, D. Ritter, and G. Eisenstein, J. Appl. Phys. 84, 6747 (1998).
- (1998) J. Appl. Phys. , vol.84 , pp. 6747
- Mikhaelashvili, V.¹ Betzer, Y.² Prudnikov, I.³ Orenstein, M.⁴ Ritter, D.⁵ Eisenstein, G.⁶

11
- 0040322495
- F. C. Chiu, J. J. Wang, J. Y. Lee, and S. C. Wu, J. Appl. Phys. 81, 6911 (1997).
- (1997) J. Appl. Phys. , vol.81 , pp. 6911
- Chiu, F.C.¹ Wang, J.J.² Lee, J.Y.³ Wu, S.C.⁴

12
- 0026383790
- S. O. Kim, J. S. Byun, and H. J. Kim, Thin Solid Films 206, 102 (1991).
- (1991) Thin Solid Films , vol.206 , pp. 102
- Kim, S.O.¹ Byun, J.S.² Kim, H.J.³

13
- 0026883406
- S. W. Park, Y. K. Baek, J. Y. Lee, C. O. Park, and H. B. Im, J. Electron. Mater. 21, 635 (1992).
- (1992) J. Electron. Mater. , vol.21 , pp. 635
- Park, S.W.¹ Baek, Y.K.² Lee, J.Y.³ Park, C.O.⁴ Im, H.B.⁵

14
- 0000449251
- C. Chaneliere, S. Four, J. L. Autran, R. A. B. Devine, and N. P. Sandler, J. Appl. Phys. 83, 4823 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 4823
- Chaneliere, C.¹ Four, S.² Autran, J.L.³ Devine, R.A.B.⁴ Sandler, N.P.⁵

15
- 0000238275
- B. K. Moon, C. Isobe, and J. Aoyama, J. Appl. Phys. 85, 1731 (1999).
- (1999) J. Appl. Phys. , vol.85 , pp. 1731
- Moon, B.K.¹ Isobe, C.² Aoyama, J.³

16
- 0029387934
- I. Kim, J. S. Kim, O. S. Kwon, S. T. Ahn, J. S. Chun, and W. J. Lee, J. Electron. Mater. 24, 1435 (1995).
- (1995) J. Electron. Mater. , vol.24 , pp. 1435
- Kim, I.¹ Kim, J.S.² Kwon, O.S.³ Ahn, S.T.⁴ Chun, J.S.⁵ Lee, W.J.⁶

17
- 0000102577
- R. A. B. Devine, L. Vallier, J. L. Autran, P. Paillet, and J. L. Leray, Appl. Phys. Lett. 68, 1775 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1775
- Devine, R.A.B.¹ Vallier, L.² Autran, J.L.³ Paillet, P.⁴ Leray, J.L.⁵

18
- 0001566211
- M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Röder, and F. Richter, Appl. Phys. Lett. 70, 1819 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1819
- Schubert, M.¹ Rheinlander, B.² Franke, E.³ Neumann, H.⁴ Hahn, J.⁵ Röder, M.⁶ Richter, F.⁷

19
- 18844368581
- M. Schubert, B. Rheinländer, E. Franke, H. Neumann, T. E. Tiwald, J. A. Woollam, J. Hahn, and F. Richter, Phys. Rev. B 56, 13 306 (1997).
- (1997) Phys. Rev. B , vol.56 , pp. 13306
- Schubert, M.¹ Rheinländer, B.² Franke, E.³ Neumann, H.⁴ Tiwald, T.E.⁵ Woollam, J.A.⁶ Hahn, J.⁷ Richter, F.⁸

20
- 0031224326
- E. Franke, M. Schubert, H. Neumann, T. E. Tiwald, D. W. Thompson, J. A. Woollam, J. Hahn, and F. Richter, J. Appl. Phys. 82, 2906 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 2906
- Franke, E.¹ Schubert, M.² Neumann, H.³ Tiwald, T.E.⁴ Thompson, D.W.⁵ Woollam, J.A.⁶ Hahn, J.⁷ Richter, F.⁸

21
- 0347007698
- E. Franke, M. Schubert, J.-D. Hecht, H. Neumann, T. E. Tiwald, H. Yao, J. A. Woollam, and J. Hahn, J. Appl. Phys. 84, 526 (1998).
- (1998) J. Appl. Phys. , vol.84 , pp. 526
- Franke, E.¹ Schubert, M.² Hecht, J.-D.³ Neumann, H.⁴ Tiwald, T.E.⁵ Yao, H.⁶ Woollam, J.A.⁷ Hahn, J.⁸

22
- 0005245086
- M. Cevro and G. Carter. Opt. Eng. 34, 603 (1995).
- (1995) Opt. Eng. , vol.34 , pp. 603
- Cevro, M.¹ Carter, G.²

23
- 84975598381
- H. Demiryont, J. R. Sites, and K. Gelb, Appl. Opt. 24, 490 (1985).
- (1985) Appl. Opt. , vol.24 , pp. 490
- Demiryont, H.¹ Sites, J.R.² Gelb, K.³

24
- 0015976948
- W. B. Westwood, R. J. Boynton, and S. J. Ingrey, J. Vac. Sci. Technol. 11, 381 (1974).
- (1974) J. Vac. Sci. Technol. , vol.11 , pp. 381
- Westwood, W.B.¹ Boynton, R.J.² Ingrey, S.J.³

25
- 3342929960
- X. H. Pan, S. L. Qiu, M. I. Florit, M. L. Shek, and M. Strongin, Phys. Rev. B 35, 3740 (1987).
- (1987) Phys. Rev. B , vol.35 , pp. 3740
- Pan, X.H.¹ Qiu, S.L.² Florit, M.I.³ Shek, M.L.⁴ Strongin, M.⁵

26
- 0032096284
- D. J. Werder and R. R. Kola, Thin Solid Films 323, 6 (1998).
- (1998) Thin Solid Films , vol.323 , pp. 6
- Werder, D.J.¹ Kola, R.R.²

27
- 0024719172
- K. Gürtler, K. Bange, W. Wagner, F. Rauch, and H. Hantsche, Thin Solid Films 175, 185 (1989).
- (1989) Thin Solid Films , vol.175 , pp. 185
- Gürtler, K.¹ Bange, K.² Wagner, W.³ Rauch, F.⁴ Hantsche, H.⁵

28
- 0032180523
- Y. Nishimura, A. Shinkawa, H. Ujita, M. Tsuji, and M. Nakamura, Appl. Surf. Sci. 136, 22 (1998).
- (1998) Appl. Surf. Sci. , vol.136 , pp. 22
- Nishimura, Y.¹ Shinkawa, A.² Ujita, H.³ Tsuji, M.⁴ Nakamura, M.⁵

29
- 0032677761
- Z. W. Fu, L. Y. Chen, and Q. Z. Qin, Thin Solid Films 340, 164 (1999).
- (1999) Thin Solid Films , vol.340 , pp. 164
- Fu, Z.W.¹ Chen, L.Y.² Qin, Q.Z.³

30
- 0001339749
- G. B. Alers, R. M. Fleming, Y. H. Wong, B. Dennis, A. Pinczuk, G. Redinbo, R. Urdahl, E. Ong, and Z. Hasan, Appl. Phys. Lett. 72, 1308 (1998).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 1308
- Alers, G.B.¹ Fleming, R.M.² Wong, Y.H.³ Dennis, B.⁴ Pinczuk, A.⁵ Redinbo, G.⁶ Urdahl, R.⁷ Ong, E.⁸ Hasan, Z.⁹

31
- 0032313038
- J. Y. Zhang, B. Lim, and I. W. Boyd. Thin Solid Films 336, 340 (1998).
- (1998) Thin Solid Films , vol.336 , pp. 340
- Zhang, J.Y.¹ Lim, B.² Boyd, I.W.³

32
- 0000773155
- J. Y. Zhang, B. Lim, and I. W. Boyd, Appl. Phys. Lett. 73, 2299 (1998).
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2299
- Zhang, J.Y.¹ Lim, B.² Boyd, I.W.³

33
- 0000097220
- K. Kukli, J. Aarik, A. Aidla, O. Kohan, T. Uustare, and V. Sammelselg, Thin Solid Films 260, 135 (1995).
- (1995) Thin Solid Films , vol.260 , pp. 135
- Kukli, K.¹ Aarik, J.² Aidla, A.³ Kohan, O.⁴ Uustare, T.⁵ Sammelselg, V.⁶

34
- 0001585325
- D. Laviale, J. C. Oberlin, and R. A. B. Devine, Appl. Phys. Lett. 65, 2021 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2021
- Laviale, D.¹ Oberlin, J.C.² Devine, R.A.B.³

35
- 0000087967
- I. Hodgkinson, Q. H. Wu, and J. Hazel, Appl. Opt. 37, 2653 (1998).
- (1998) Appl. Opt. , vol.37 , pp. 2653
- Hodgkinson, I.¹ Wu, Q.H.² Hazel, J.³

36
- 35949035159
- D. Aspnes and J. B. Theeten, Phys. Rev. B 20, 3292 (1979).
- (1979) Phys. Rev. B , vol.20 , pp. 3292
- Aspnes, D.¹ Theeten, J.B.²

37
- 0003808259
- North-Holland, Amsterdam
- R. M. A. Azzam, and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

38
- 0031998601
- G. E. Jellison, Thin Solid Films 313-314, 33 (1998).
- (1998) Thin Solid Films , vol.313-314 , pp. 33
- Jellison, G.E.¹

39
- 0000096595
- C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson, J. Appl. Phys. 83, 3323 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 3323
- Herzinger, C.M.¹ Johs, B.² McGahan, W.A.³ Woollam, J.A.⁴ Paulson, W.⁵

40
- 0004040706
- Academic, New York
- E. D. Palik, Handbook of Optical Constant of Solids (Academic, New York, 1998).
- (1998) Handbook of Optical Constant of Solids
- Palik, E.D.¹

41
- 17144462108
- T. E. Tiwald, D. W. Thompson, J. A. Woollam, and S. V. Pepper, Thin Solid Films 313-314, 718 (1998).
- (1998) Thin Solid Films , vol.313-314 , pp. 718
- Tiwald, T.E.¹ Thompson, D.W.² Woollam, J.A.³ Pepper, S.V.⁴

42
- 36449001748
- C. M. Herzinger, P. G. Snyder, B. Johs, and J. A. Woollam, J. Appl. Phys. 77, 1715 (1995).
- (1995) J. Appl. Phys. , vol.77 , pp. 1715
- Herzinger, C.M.¹ Snyder, P.G.² Johs, B.³ Woollam, J.A.⁴

43
- 0029304872
- C. M. Herzinger, H. Yao, P. G. Snyder, F. G. Celii, Y. C. Kao, B. Johs, and J. A. Woollam, J. Appl. Phys. 77, 4677 (1995).
- (1995) J. Appl. Phys. , vol.77 , pp. 4677
- Herzinger, C.M.¹ Yao, H.² Snyder, P.G.³ Celii, F.G.⁴ Kao, Y.C.⁵ Johs, B.⁶ Woollam, J.A.⁷

44
- 85037466671
- J. A. Woollam Co., Inc., Lincoln, NE
- Guide to Use WVASE 32 (J. A. Woollam Co., Inc., Lincoln, NE, 1995).
- (1995) Guide to Use WVASE 32

45
- 0000679415
- S. Zollner, Appl. Phys. Lett. 63, 2523 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2523
- Zollner, S.¹

46
- 0001596283
- M. Schubert, J. A. Woollam, G. Leibiger, B. Rheinländer, I. Pietzonka, T. Sass, and V. Gottschalch, J. Appl. Phys. 86, 2025 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 2025
- Schubert, M.¹ Woollam, J.A.² Leibiger, G.³ Rheinländer, B.⁴ Pietzonka, I.⁵ Sass, T.⁶ Gottschalch, V.⁷

47
- 0000068244
- C. C. Kim, J. W. Garland, H. Abad, and P. M. Raccah, Phys. Rev. B 45, 11 749 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 11749
- Kim, C.C.¹ Garland, J.W.² Abad, H.³ Raccah, P.M.⁴

48
- 11644256156
- C. C. Kim, J. W. Garland, and P. M. Raccah, Phys. Rev. B 47, 1876 (1993).
- (1993) Phys. Rev. B , vol.47 , pp. 1876
- Kim, C.C.¹ Garland, J.W.² Raccah, P.M.³

49
- 26144441737
- J. W. Garland, C. Kim, H. Abad. and P. M. Raccah, Phys. Rev. B 41, 7602 (1990).
- (1990) Phys. Rev. B , vol.41 , pp. 7602
- Garland, J.W.¹ Kim, C.² Abad, H.³ Raccah, P.M.⁴

50
- 85037455728
- US Patent No. 5 796 983 (1998)
- C. M. Herzinger and B. D. Johs, US Patent No. 5 796 983 (1998).
- Herzinger, C.M.¹ Johs, B.D.²

51
- 0001311937
- M. Schubert, T. E. Tiwald, and C. M. Herzinger, Phys. Rev. B 61, 8187 (2000).
- (2000) Phys. Rev. B , vol.61 , pp. 8187
- Schubert, M.¹ Tiwald, T.E.² Herzinger, C.M.³

52
- 0034664539
- A. Kasic, M. Schubert, T. E. Tiwald, S. Einfeldt, and D. Hommel, Phys. Rev. B 62, 7365 (2000).
- (2000) Phys. Rev. B , vol.62 , pp. 7365
- Kasic, A.¹ Schubert, M.² Tiwald, T.E.³ Einfeldt, S.⁴ Hommel, D.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.