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Volumn 41, Issue 4, 2007, Pages 458-461
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Combined CL/EBIC/DLTS investigation of a regular dislocation network formed by Si wafer direct bonding
a,b b,d a,b a,b b a,b c |
Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 34247607258
PISSN: 10637826
EISSN: None
Source Type: Journal
DOI: 10.1134/S1063782607040197 Document Type: Article |
Times cited : (10)
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References (12)
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