Nano-graphoepitaxy of semiconductors for 3D integration

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 891-894

  Crnogorac, F ^a   Witte, D J ^a   Xia, Q ^b   Rajendran, B ^a   Pickard, D S ^a   Liu, Z ^a   Mehta, A ^a   Sharma, S ^c   Yasseri, A ^c   Kamins, T I ^c   Chou, S Y ^b   Pease, R F W ^a  

^a STANFORD UNIVERSITY   (United States)

^b PRINCETON UNIVERSITY   (United States)

^c HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

Crystallization; Graphoepitaxy; Nanoimprint; Transient heating

Indexed keywords

CONTINUOUS WAVE LASERS; CRYSTALLIZATION; SEMICONDUCTOR MATERIALS; SILICON; SINGLE CRYSTALS; SUBSTRATES; THIN FILMS; THREE DIMENSIONAL COMPUTER GRAPHICS;

GRAPHOEPITAXY; INTEGRATING SEMICONDUCTOR DEVICES; NANOIMPRINT; TRANSIENT HEATING;

NANOTECHNOLOGY;

EID: 34247575248     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.067     Document Type: Article

References (8)

1. Banerjee K., Souri S.J., Kapur P., and Saraswat K.C. Proc. IEEE 89 (2001) 602
2. K.W. Guarini, A.W. Topol, M. Ieong, R. Yu, L. Shi, M.R. Newport, D.J. Frank, D.V. Singh, G.M. Cohen, S.V. Nitta, D.C. Boyd, P.A. O'Neil, S.L. Tempest, H.B. Pogge, S. Purushothaman, W.E. Haensch, in: Tech. Digest, IEEE Int. Electron Devices Meet., 8-11 Dec. 2002, p. 943.
3. A.W. Topol, D.C. La Tulipe, L. Shi, S.M. Alam, D.J. Frank, S.E. Steen, J. Vichiconti, D. Posillico, M. Cobb, S. Medd, J. Patel, S. Goma, D. DiMilia, M.T. Robson, E. Duch, M. Farinelli, C. Wang, R.A. Conti, D.M. Canaperi, L. Deligianni, A. Kumar, K.T. Kwietniak, C. D'Emic, J. Ott, A.M. Young, K.W. Guarini, M. Ieong, in: Tech. Digest, IEEE Int. Electron Devices Meet., Dec. 5, 2005, p. 352.
4. B. Rajendran, R. Shenoy, D.J. Witte, N.S. Chokshi, R.L. DeLeon, G.S. Tompa, R.F.W. Pease, Proc. VLSI Multilevel Interconnection Conf. (2005).
5. Geis M.W., Smith H.I., and Flanders D.C. Appl. Phys. Lett. 35 1 (1979) 71
6. D. Witte, F. Crnogorac, A. Mehta, Z. Liu, B. Rajendran, D.S. Pickard, P. Pianetta, R.F.W. Pease, submitted to Microelectronics Engineering MNE2006 special volume.
7. Chou S.Y., Krauss P.R., and Renstrom P. J. Sci. 272 (1996) 85
8. Givargizov E.I., and Sheftal N.N. Current Topics in Materials Science 10 (1982) 3