Control of wall thickness in the formation of ordered mesoporous silica films

Thin Solid Films

Volumn 515, Issue 16 SPEC. ISS., 2007, Pages 6521-6525

  Jung, Sang Bae ^a   Ha, Tae Jung ^a   Park, Hyung Ho ^a  

^a Yonsei University   (South Korea)

Author keywords

Block copolymer; Low k; Ordered mesoporous silica films; Silica wall

Indexed keywords

CATALYSTS; FILM THICKNESS; MESOPOROUS MATERIALS; MICELLES; PORE STRUCTURE; SILICA;

CATALYTIC ACID; ORDERED MESOPOROUS SILICA FILMS; ORGANIC-INORGANIC ELECTROSTATIC INTERACTION; SILICA WALL; SILICIC ACIDS; WALL THICKNESS;

THIN FILMS;

EID: 34247545620     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.062     Document Type: Article

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