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Volumn 2006, Issue , 2006, Pages

20mΩcm2 660V super junction MOSFETs fabricated by deep trench etching and epitaxial growth

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTROCHEMICAL ETCHING; EPITAXIAL GROWTH; ION IMPLANTATION; MICROFABRICATION; SEMICONDUCTOR JUNCTIONS;

EID: 34247481026     PISSN: 10636854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (29)

References (8)
  • 1
    • 0031251517 scopus 로고    scopus 로고
    • Theory of Semiconductor Superjunction Device
    • T. Fujihira, "Theory of Semiconductor Superjunction Device", Jpn. J. Appl. Phys., vol. 36, pp. 6254-6562 (1997)
    • (1997) Jpn. J. Appl. Phys , vol.36 , pp. 6254-6562
    • Fujihira, T.1
  • 2
    • 0032256942 scopus 로고    scopus 로고
    • A new generation of high voltage MOSFETs breaks the limit line of silicon
    • G. Deboy, M. Marz, J.P. Stengl, H. Strack, J. Tihany and H. Weber, "A new generation of high voltage MOSFETs breaks the limit line of silicon," Proc. IEDM, pp. 683-685, 1998.
    • (1998) Proc. IEDM , pp. 683-685
    • Deboy, G.1    Marz, M.2    Stengl, J.P.3    Strack, H.4    Tihany, J.5    Weber, H.6
  • 5
    • 0042014560 scopus 로고    scopus 로고
    • Electrical Properties of Super Junction p-n Diodes Fabricated by Trench Filling
    • S.Yamauchi, Y. Hattori and H. Yamaguchi., "Electrical Properties of Super Junction p-n Diodes Fabricated by Trench Filling", Proc. ISPSD, pp. 207-210, 2003.
    • (2003) Proc. ISPSD , pp. 207-210
    • Yamauchi, S.1    Hattori, Y.2    Yamaguchi, H.3
  • 6
    • 4944245536 scopus 로고    scopus 로고
    • Design of a 200V Super Junction MOSFET with n-buffer regions and its Fabrication by Trench Filling
    • Y. Hattori, K. Nakashima, M. Kuwahara, T. Yoshida, S. Yamauchi and H. Yamaguchi, "Design of a 200V Super Junction MOSFET with n-buffer regions and its Fabrication by Trench Filling", Proc. ISPSD, pp. 189-192, 2004.
    • (2004) Proc. ISPSD , pp. 189-192
    • Hattori, Y.1    Nakashima, K.2    Kuwahara, M.3    Yoshida, T.4    Yamauchi, S.5    Yamaguchi, H.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.