Fabrication of SiGe-on-insulator by improved Ge condensation technique

Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest

Volumn 2006, Issue , 2006, Pages

  Damlencourt, J F ^a   Vincent, B ^a   Rivallin, P ^a   Holliger, P ^a   Rouchon, D ^a   Nolot, E ^a   Licitra, C ^a   Morand, Y ^b   Clavelier, L ^a   Billon, T ^a  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34247468465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/istdm.2006.246531     Document Type: Conference Paper

References (8)

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