SCOPUS 정보 검색 플랫폼

Volumn 87, Issue 4, 2007, Pages 673-677

Replica molding of picosecond laser fabricated Si microstructures

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; FLUORINE COMPOUNDS; LASER BEAM EFFECTS; MORPHOLOGY; PLASTICS MOLDING; POLYDIMETHYLSILOXANE;

PHOTOCURABLE RESIST MATERIALS; POLYDIMETHYLSILOXANE MOLDING; SINGLE CRYSTALLINE SILICON;

MICROCRYSTALLINE SILICON;

EID: 34247396082 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-007-3881-4 Document Type: Article

Times cited : (11)

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