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Physical Review Letters

Volumn 98, Issue 16, 2007, Pages

New self-limiting assembly model for Si quantum rings on Si(100)

(8) Yu, L W a Chen, K J a Song, J a Xu, J a Li, W a Li, X F a Wang, J M a Huang, X F a

a NANJING UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM THEORY; SEMICONDUCTOR GROWTH; SILICON COMPOUNDS;

EDGE WIDTH; GROWTH-ETCHING COMPETITION; TIMING PROCEDURE;

SELF ASSEMBLY;

EID: 34247274085 PISSN: 00319007 EISSN: 10797114 Source Type: Journal
DOI: 10.1103/PhysRevLett.98.166102 Document Type: Article

Times cited : (34)

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