SCOPUS 정보 검색 플랫폼

Volumn 56, Issue 12, 2007, Pages 1011-1014

X-ray absorption spectroscopy study at the Si K-edge of tungsten carbide-silicon carbide thin films

Author keywords

Carbides; Physical vapor deposition; X ray absorption spectroscopy; X ray diffraction

Indexed keywords

CRYSTALLIZATION; PHYSICAL VAPOR DEPOSITION; SILICON CARBIDE; SPUTTER DEPOSITION; TUNGSTEN CARBIDE; X RAY ABSORPTION SPECTROSCOPY; X RAY DIFFRACTION;

CRYSTALLINITY; FILM COMPOSITION; K-EDGE; STRUCTURAL NATURE;

THIN FILMS;

EID: 34247177443 PISSN: 13596462 EISSN: None Source Type: Journal
DOI: 10.1016/j.scriptamat.2007.03.001 Document Type: Article

Times cited : (5)

References (14)

1
- 36449001310
- Veprek S., Reiprich S., and Shizhi L. Appl. Phys. Lett. 66 (1995) 2640
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2640
- Veprek, S.¹ Reiprich, S.² Shizhi, L.³

2
- 0032046770
- Veprek S. Thin Solid Films 317 (1998) 449
- (1998) Thin Solid Films , vol.317 , pp. 449
- Veprek, S.¹

3
- 2142806777
- Veprek S., Nesladek P., Niederhofer A., Glatz F., Jilek M., and Sima M. Surf. Coat. Technol. 108-109 (1998) 138
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 138
- Veprek, S.¹ Nesladek, P.² Niederhofer, A.³ Glatz, F.⁴ Jilek, M.⁵ Sima, M.⁶

4
- 0034310611
- Veprek S., Niederhofer A., Moto K., Bolom T., Mannling H.D., Nesladek P., Dollinger G., and Bergmaier A. Surf. Coat. Technol. 133-134 (2000) 152
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 152
- Veprek, S.¹ Niederhofer, A.² Moto, K.³ Bolom, T.⁴ Mannling, H.D.⁵ Nesladek, P.⁶ Dollinger, G.⁷ Bergmaier, A.⁸

5
- 0034310535
- Rebouta L., Tavares C.J., Aimo R., Wang Z., Pischow K., Alves E., Rojas T.C., and Odriozola J.A. Surf. Coat. Technol. 133-134 (2000) 234
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 234
- Rebouta, L.¹ Tavares, C.J.² Aimo, R.³ Wang, Z.⁴ Pischow, K.⁵ Alves, E.⁶ Rojas, T.C.⁷ Odriozola, J.A.⁸

6
- 0034499661
- Vaz F., Rebouta L., Goudeau P., Pacaud J., Garem H., Riviere J.P., Cavaleiro A., and Alves E. Surf. Coat. Technol. 133-134 (2000) 307
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 307
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³ Pacaud, J.⁴ Garem, H.⁵ Riviere, J.P.⁶ Cavaleiro, A.⁷ Alves, E.⁸

7
- 1342289374
- Zhang X.D., Meng W.J., Wang W., Rehn L.E., Baldo P.M., and Evans R.D. Surf. Coat. Technol. 177-178 (2004) 325
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 325
- Zhang, X.D.¹ Meng, W.J.² Wang, W.³ Rehn, L.E.⁴ Baldo, P.M.⁵ Evans, R.D.⁶

8
- 0036806725
- Meng W.J., Zhang X.D., Shi B., Tittsworth R.C., Rehn L.E., and Baldo P.M. J. Mater. Res. 17 (2002) 2628
- (2002) J. Mater. Res. , vol.17 , pp. 2628
- Meng, W.J.¹ Zhang, X.D.² Shi, B.³ Tittsworth, R.C.⁴ Rehn, L.E.⁵ Baldo, P.M.⁶

9
- 0036968258
- Endrino J.L., and Krzanowski J.E. J. Mater. Res. 17 (2002) 3163
- (2002) J. Mater. Res. , vol.17 , pp. 3163
- Endrino, J.L.¹ Krzanowski, J.E.²

10
- 28444465169
- Krzanowski J.E., and Wormwood J. Metall. Mater. Trans. 36A (2005) 3055
- (2005) Metall. Mater. Trans. , vol.36 A , pp. 3055
- Krzanowski, J.E.¹ Wormwood, J.²

11
- 18644362640
- Sammynaiken R., et al. J. Appl. Phys. 92 (2002) 3000
- (2002) J. Appl. Phys. , vol.92 , pp. 3000
- Sammynaiken, R.¹

12
- 34247155608
- Hu Y.F., et al. J. Eletron Spectrosc. 135 (2004) 43
- (2004) J. Eletron Spectrosc. , vol.135 , pp. 43
- Hu, Y.F.¹

13
- 0007317447
- Zhang Y.F., et al. Phys. Rev. B 61 (2000) 8298
- (2000) Phys. Rev. B , vol.61 , pp. 8298
- Zhang, Y.F.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.