SIMS as a subnanometer probe: A new tool for chemical profile analysis of grafted molecules

Applied Surface Science

Volumn 253, Issue 14, 2007, Pages 6140-6143

  Chérioux, Frédéric ^a   Gauthier Manuel, Bernard ^a   Eccles, John ^b   Grenut, Thierry ^c   Briant, Marc ^c  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b Millbrook Instruments Limited   (United Kingdom)

^c Elexience   (France)

Author keywords

Depth profiling; SAMs; SIMS; Sputtering; Submolecular

Indexed keywords

CHEMICAL PROPERTIES; DEPTH PROFILING; SECONDARY ION MASS SPECTROMETRY; SILICON; SPUTTERING;

GRAFTED MOLECULES; ORGANIC MOLECULES; SAM; SUBNANOMETER PROBES;

MOLECULAR DYNAMICS;

EID: 34247144541     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.01.017     Document Type: Article

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