Broadening the horizons of SIMS: The low cost chemical microscope

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 106-112

  Eccles, A J ^a   Steele, T A ^a   Robinson, A W ^b  

^a Blackburn Technology Centre   (United Kingdom)

^b UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Imaging SIMS; Instrumentation; Secondary ion mass spectrometry; Surface coatings; Surface contaminants

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; IMAGING SYSTEMS; KNOWLEDGE BASED SYSTEMS; MICROSCOPES; RELIABILITY; SURFACE PHENOMENA;

LOW COST CHEMICAL MICROSCOPE; ROUTINE SURFACE ANALYSIS; SURFACE COATINGS; SURFACE CONTAMINANTS;

SECONDARY ION MASS SPECTROMETRY;

EID: 0032625446     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00776-4     Document Type: Article

References (13)

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12. A.J. Eccles, T.A. Steele, A. Afzal, C.A. Rego, W. Ahmed, P.W. May, S.M. Leeds, these proceedings, Thin Solid Films, 1998, in press.
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