Diffusion of solvents in thin porous films

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Volumn 300, Issue 1-2 SPEC. ISS., 2007, Pages 111-116

  Shamiryan, D ^a   Baklanov, M R ^a   Lyons, P ^a   Beckx, S ^a   Boullart, W ^a   Maex, K ^a  

^a IMEC   (Belgium)

Author keywords

Diffusion; Low k dielectric; Pore interconnectivity; Porosity

Indexed keywords

ACTIVATION ENERGY; DIELECTRIC FILMS; DIFFUSION; PERMITTIVITY; POROSITY; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS;

MOLECULE SIZE; PORE INTERCONNECTIVITY; POROUS FILMS;

SOLVENTS;

SOLVENT;

ARTICLE; COMPARATIVE STUDY; CORRELATION COEFFICIENT; DIELECTRIC CONSTANT; DIFFUSION; DIFFUSION COEFFICIENT; ENERGY; ENTHALPY; EVAPORATION; FILM; MEASUREMENT; MEMBRANE STRUCTURE; MOLECULAR SIZE; POROSITY; PRIORITY JOURNAL; STRUCTURE ANALYSIS; VISCOSITY;

EID: 34247107908     PISSN: 09277757     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.colsurfa.2006.10.055     Document Type: Article

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