Study of the first nucleation steps of thin films by XPS inelastic peak shape analysis

Surface and Interface Analysis

Volumn 39, Issue 4, 2007, Pages 331-336

  Mansilla, C ^a   Gracia, F ^a   Martin Concepcion A I ^a   Espinos J P ^a   Holgado, J P ^a   Yubero, F ^a   Gonzalez Elipe A R ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

Author keywords

Growth mechanism; Nucleation; Physical vapour deposition (PVD); X ray photoelectron spectroscopy (XPS)

Indexed keywords

CERIUM COMPOUNDS; DEPOSITION; FILM GROWTH; NUCLEATION; PHYSICAL VAPOR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; VANADIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

CADMIUM SULFIDE; CERIUM OXIDE; VANADIUM OXIDE; X-RAY PHOTOELECTRON SPECTRA;

THIN FILMS;

EID: 34147196578     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2509     Document Type: Article

References (24)

1. Pranevicius L. Thin Solid Films 1979; 63: 77.
2. Arnault JC, Delafond J, Templier C, Chaumont J, Enea O. Nucl. Instrum. Methods Phys. Res., Sect. B 1993; 81: 1384.
3. Bolt PH, Ten Grotenhuis E, Geus JW, Habraken FHPM. Surf. Sci. 1995; 329: 227.
4. Brune H. Surf. Sci. Rep. 1998; 31: 121.
5. Jiménez VM, Espinós JP, González-Elipe AR. Surf. Interface Anal. 1998; 26: 62.
6. Tougaard S. Surf. Interface Anal. 1998; 26: 249.
7. Tougaard S. J. Vac. Sci. Technol. A 1990; 8: 2197.
8. Tougaard S. J. Vac. Sci. Technol. A 1996; 14: 1415.
9. Schleberger M, Fujita D, Scharfschwerdt C, Tougaard S. J. Vac. Sci. Technol. B 1995; 13: 949.
10. Cohen Simonsen A, Pøhler JP, Jeynes C, Tougaard S. Surf. Interface Anal. 1999; 27: 52.
11. Cohen Simonsen A, Schleberger M, Tougaard S, Hansen JL, Nylandsted Larsen A. Thin Solid Films 1999; 338: 165.
12. Yubero F, González-Elipe AR, Tougaard S. Surf. Sci. 2000; 457: 24.
13. Martin-Concepcion AI, Yubero F, Espinós JP, González-Elipe AR, Tougaard S. J. Vac. Sci. Technol. A 2003; 21: 1393.
14. Reiche R, Oswalds, Yubero F, Espinós JP, Holgado JP, González-Elipe AR. J. Phys. Chem. B 2004; 108: 9905.
15. Gracia F, Yubero F, Espinós JP, González-Elipe AR. Appl. Surf. Sci. 2005; 252: 189.
16. Espinós JP, Martín-Concepción AI, Mansilla C, Yubero F, González-Elipe AR. J. Vac. Sci. Technol. A 2006; 24: 919.
17. Mansilla C, Yubero F, Zier M, Reiche R, Oswald S, Holgado JP, Espinós JP, González-Elipe AR. Surf. Interface Anal. 2006; 38: 510.
18. Tougaard S. QUASES, Software package for quantitative XPS/AES of surface nanostructures by inelastic peak shape analysis; see www.QUASES.com.
19. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1993; 21: 165.
20. Thornton JA. J. Vac. Sci. Technol. A 1986; 4: 3059.
21. Durand HA, Sekine K, Eton K, Ito K, Kataoka I. J. Appl. Phys. 1998; 84: 2591.
22. González-Elipe AR, Yubero F, Sanz JM. Low Energy Ion Assisted Film Growth. Imperial College Press: London, 2003.
23. Campbell CT. Surf. Sci. Rep. 1997; 27: 1.
24. Lide DR. Handbook of Chemistry and Physics, Standard thermodynamic properties of chemical subtances, CRC Press: New York, 2003; 5.4.