Atomic layer deposition of ZnO thin films on boron-doped nanocrystalline diamond

Diamond and Related Materials

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 983-986

  Hikavyy, A ^a   Clauws, P ^a   Vanbesien, K ^a   De Visschere, P ^a   Williams, O A ^b   Daenen, M ^b   Haenen, K ^b   Butler, J E ^c   Feygelson, T ^c  

^a GHENT UNIVERSITY   (Belgium)

^b HASSELT UNIVERSITY   (Belgium)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

ALCVD; Nanocrystalline diamond; ZnO

Indexed keywords

ATOMIC LAYER DEPOSITION; CHEMICAL VAPOR DEPOSITION; DIAMONDS; FILM GROWTH; HYDROTHERMAL SYNTHESIS; ZINC OXIDE;

CURRENT RECTIFICATION; NANOCRYSTALLINE DIAMOND; PRECURSORS PULSES;

THIN FILMS;

EID: 34147160741     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.11.035     Document Type: Article

References (11)

1. Wang C.X., Yang C.W., Zhang T.C., Liu H.W., Han Y.H., Luo J.F., and Gao C.X. Diamond and Related Materials 12 (2003) 1548
2. Lamara T., Belmahi M., Elmazria O., Le Brizoual L., Bougdira J., and Remy M. Diamond and Related Materials 13 (2004) 581
3. El Hakiki M., Elmazria O., Assouar M.B., Mortet V., Le Brizoual L., and Vanecek M. Diamond and Related Materials 14 (2005) 1175
4. Bi B., Huang W.-S., Asmussen J., and Golding B. Diamond and Related Materials 11 (2002) 677
5. Vayssieres L., Keis K., Lindquist S.-E., and Hagfeld A. Journal of Physical Chemistry B 105 (2001) 3350
6. T. Suntola in Handbook of Crystal Growth, Vol. 3 edited by D.T. Hurle.
7. Ritala M., and Leslelä M. Nanotechnology 10 (1999) 19
8. A. Hikavyy, P. Clauws, J. Maes, V.V. Moshchalkov, J. Butler, T. Feygelson, O.A. Williams, M. Daenen, K. Haenen to be published in Phys. Stat. Sol. (a) 203/12 (2006).
9. Ritala M., Asikainen T., Leskelä M., and Skarp J. Materials Research Society Symposium Proceedings 426 (1996) 513
10. Lujala V., Skarp J., Tammenmaa M., and Suntola T. Aplied Surface Science 82/83 (1994) 34
11. Matero R., Rahtu A., Ritala M., Leskela M., and Sajavaara T. Thin Solid Films 368 (2000) 1