Optical and mass spectroscopy measurements of Ar/CH4/H2 microwave plasma for nano-crystalline diamond film deposition

Diamond and Related Materials

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 675-678

  Zhou, Haiyang ^a,b   Watanabe, Jun ^a   Miyake, Masato ^a   Ogino, Akihisa ^a   Nagatsu, Masaaki ^a   Zhan, Rujuan ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Nano crystalline diamond film; Optical emission; Plasma CVD; QMS

Indexed keywords

DISSOCIATION; MASS SPECTROMETRY; NANOCRYSTALLINE MATERIALS; OPTICAL EMISSION SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SYNTHESIS (CHEMICAL);

MICROWAVE PLASMA; NANOCRYSTALLINE DIAMOND FILM; QUADRUPOLE MASS SPECTROSCOPY (QMS);

DIAMOND FILMS;

EID: 34147147594     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.11.074     Document Type: Article

References (17)

1. Gruen D., Zuiker C., Krauss A., and Pan X. J. Vac. Sci. Technol., A, Vac. Surf. Films 13 (1995) 1628
2. Lin T., Yu G., Wee A., Shen Z., and Loh K. Appl. Phys. Lett. 77 (2000) 2692
3. Birrell J., Gerbi J.E., Auciello O., Gibson J.M., Gruen D.M., and Carlisle J.A. J. Appl. Phys. 93 (2003) 5606
4. Rabeau J.R., John P., and Wilson J.I.B. J. Appl. Phys. 96 (2004) 6724
5. May P.W., Smith J.A., and Mankelevich Yu.A. Diamond Relat. Mater. 15 (2006) 345
6. May P.W., Harvey J.N., Smith J.A., and Mankelevich Yu.A. J. Appl. Phys. 99 (2006) 104907
7. Miyake M., Ogino A., and Nagatsu M. Thin Solid Films 515 (2007) 4258
8. Luque J., Juchmann W., Brinkman E.A., and Jeffries J.B. J. Vac. Sci. Technol., A, Vac. Surf. Films 16 (1998) 397
9. Han J.C., Ye C., Suto M., and Lee L.C. J. Chem. Phys. 90 (1989) 4000
10. Graham W.R., Dismuke K.I., and Welter W. J. Astrophys. 204 (1976) 301
11. Khachan J., James B.W., and Marfoure A. Appl. Phys. Lett. 77 (2000) 2973
12. Goyette A.N., Lawler J.E., Anderson L.W., Gruen D.M., McCauley T.G., Zhou D., and Krauss A.R. Plasma Sources Sci. Technol. 7 (1998) 149
13. Zhou D., Gruen D.M., Qin L.C., McCauley T.G., and Krauss A.R. J. Appl. Phys. 84 (1998) 1981
14. Vazquez F.J.G., and Albella J.M. J. Appl. Phys. 94 (2003) 6085
15. Lombardi G., Hassouni K., Benedic F., Mohasseb F., Ropcke J., and Gicquel A. J. Appl. Phys. 96 (2004) 6739
16. Heintze M., Magureanu M., and Kettlitz M. J. Appl. Phys. 92 (2002) 7022
17. van de Sanden M.C.M., Severens R.J., Meulenbroeks R.F.G., de Graaf M.J., Qing Z., Otorbaev D.K., Engeln R., Gielen J.W.A.M., van de Mullen J.A.M., and Schram D.C. Surf. Coat. Technol. 74-75 (1995) 1