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Applied Physics Letters

Volumn 77, Issue 19, 2000, Pages 2973-2975

Effect of repetition rate of a pulsed microwave diamond forming plasma on the density of C2

(3) Khachan, J b James, B W b Marfoure, A a

a UNIVERSITÉ D'ORLÉANS (France)

b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012283935 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1324722 Document Type: Article

Times cited : (11)

References (15)

1
- 36448999010
- A. Hatta, K. Kadota, Y. Mori, T. Ito, T. Sasaki, A. Hiraki, and S. Okada, Appl. Phys. Lett. 66, 1602 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1602
- Hatta, A.¹ Kadota, K.² Mori, Y.³ Ito, T.⁴ Sasaki, T.⁵ Hiraki, A.⁶ Okada, S.⁷

2
- 13544254836
- A. Hatta, H. Suzuki, K. Kadota, T. Ito, and A. Hiraki, Thin Solid Films 281/282, 264 (1996).
- (1996) Thin Solid Films , vol.281-282 , pp. 264
- Hatta, A.¹ Suzuki, H.² Kadota, K.³ Ito, T.⁴ Hiraki, A.⁵

3
- 0028381528
- J. Laimer, M. Shimokawa, and S. Matsumoto, Diamond Relat. Mater. 3, 231 (1994).
- (1994) Diamond Relat. Mater. , vol.3 , pp. 231
- Laimer, J.¹ Shimokawa, M.² Matsumoto, S.³

4
- 0037962131
- J. Khachan and D. Gardner, J. Appl. Phys. 86, 6576 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 6576
- Khachan, J.¹ Gardner, D.²

5
- 21844493878
- D. M. Gruen, C. D. Zuiker, A. R. Krauss, and X. Pan, J. Vac. Sci. Technol. A 13, 1628 (1995).
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 1628
- Gruen, D.M.¹ Zuiker, C.D.² Krauss, A.R.³ Pan, X.⁴

6
- 0030181257
- P. C. Redfern, D. A. Horner, L. A. Curtiss, and D. M. Gruen, J. Phys. Chem. 100, 11654 (1996).
- (1996) J. Phys. Chem. , vol.100 , pp. 11654
- Redfern, P.C.¹ Horner, D.A.² Curtiss, L.A.³ Gruen, D.M.⁴

7
- 0000290089
- J. Khachan, J. R. Pigott, G. F. Brand, I. S. Falconer, and B. W. James, Rev. Sci. Instrum. 64, 2971 (1993).
- (1993) Rev. Sci. Instrum. , vol.64 , pp. 2971
- Khachan, J.¹ Pigott, J.R.² Brand, G.F.³ Falconer, I.S.⁴ James, B.W.⁵

8
- 0000924399
- H. N. Chu, E. A. Den Hartog, A. R. Lefkow, J. Jacobs, L. W. Anderson, M. G. Lagally, and J. E. Lawler, Phys. Rev. A 44, 3796 (1991).
- (1991) Phys. Rev. A , vol.44 , pp. 3796
- Chu, H.N.¹ Den Hartog, E.A.² Lefkow, A.R.³ Jacobs, J.⁴ Anderson, L.W.⁵ Lagally, M.G.⁶ Lawler, J.E.⁷

9
- 0021481365
- K. Tachihana, M. Nishida, H. Harima, and Y. Urano, J. Phys. D 17, 1727 (1984).
- (1984) J. Phys. D , vol.17 , pp. 1727
- Tachihana, K.¹ Nishida, M.² Harima, H.³ Urano, Y.⁴

10
- 0347638373
- W. Möller, Appl. Phys. A: Solids Surf. 56, 527 (1993).
- (1993) Appl. Phys. A: Solids Surf. , vol.56 , pp. 527
- Möller, W.¹

11
- 0004478754
- J. Geddes, R. W. McCullough, A. Donnelly, and H. B. Gilbody, Plasma Sources Sci. Technol. 2, 93 (1993).
- (1993) Plasma Sources Sci. Technol. , vol.2 , pp. 93
- Geddes, J.¹ McCullough, R.W.² Donnelly, A.³ Gilbody, H.B.⁴

12
- 0343089411
- A. B. Ehrhardt and W. D. Langer, Princeton Plasma Physics Laboratory Report PPPL - 2477 (1987).
- (1987) Princeton Plasma Physics Laboratory Report PPPL - 2477
- Ehrhardt, A.B.¹ Langer, W.D.²

13
- 0342989480
- M. J. Wouters, Plasma Sources Sci. Technol. 4, 482 (1995).
- (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 482
- Wouters, M.J.¹

14
- 0032073764
- A. N. Goyette, J. E. Lawler, L. W. Anderson, D. M. Gruen, T. G. McCauley, D. Zhou, and A. R. Krauss, Plasma Sources Sci. Teehnol. 7, 149 (1998).
- (1998) Plasma Sources Sci. Teehnol. , vol.7 , pp. 149
- Goyette, A.N.¹ Lawler, J.E.² Anderson, L.W.³ Gruen, D.M.⁴ McCauley, T.G.⁵ Zhou, D.⁶ Krauss, A.R.⁷

15
- 0032021568
- J. S. Foord, K. P. Loh, and R. B. Jackman, Surf. Sci. 399. 1 (1998).
- (1998) Surf. Sci. , vol.399 , pp. 1
- Foord, J.S.¹ Loh, K.P.² Jackman, R.B.³

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