Characteristics of nano-crystalline diamond films prepared in Ar/H2/CH4 microwave plasma

Thin Solid Films

Volumn 515, Issue 9, 2007, Pages 4258-4261

  Miyake, Masato ^a   Ogino, Akihisa ^a   Nagatsu, Masaaki ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

CVD; Microwave plasma; Nanocrystalline diamond; Raman spectrum

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; DEGRADATION; GRAIN SIZE AND SHAPE; METHANE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING;

MICROWAVE PLASMA; NANOCRYSTALLINE DIAMOND; RAMAN MEASUREMENTS; SURFACE ANALYSIS;

DIAMOND FILMS;

EID: 33847025342     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.02.048     Document Type: Article

References (20)

1. Hong S.P., Yoshikawa H., Wazumi K., and Koga Y. Diamond Relat. Mater. 11 (2002) 877
2. Gupta S., Weiner B.R., and Morell G. Diamond Relat. Mater. 11 (2002) 799
3. Corrigan T.D., Gruen D.M., Krauss A.R., and Zapol P. Diamond Relat. Mater. 11 (2002) 43
4. Vazquez F.J.G., and Albella J.M. J. Appl. Phys. 94 (2003) 6085
5. Gruen D.M., Liu S., Krauss A.R., Luo J., and Pan X. Appl. Phys. Lett. 64 (1994) 1502
6. Gruen D.M. Annu. Rev. Mater. Sci. 29 (1999) 211
7. Chein T.H., Wei J., and Tzeng Y. Diamond Relat. Mater. 8 (1999) 1686
8. Zhou D., Gruen D.M., Qin L.C., McCauley T.G., and Krauss A.R. J. Appl. Phys. 84 (1998) 1981
9. Nagatsu M., Makino M., Tanga M., and Sugai H. Diamond Relat. Mater. 11 (2002) 562
10. Matsumoto O., and Katagiri T. Thin Solid Films 146 (1987) 283
11. Liu Y.K., Tzeng Y., Liu C., Tso P., and Lin I.N. Diamond Relat. Mater. 13 (2004) 1859
12. Thareja R.K., Dwivedi R.K., and Abbilasha. Phys. Rev., B 55 (1997) 2600
13. Chein T.-H., Wei J., and Tzeng Y. Diamond Relat. Mater. 8 (1999) 1686
14. Goyette A.N., Lawler J.E., Anderson L.W., Gruen D.M., and McCauley T.G. J. Phys., D 31 (1998) 1975
15. López-Ríos T., Sandré É., Leclercq S., and Sauvain É. Phys. Rev. Lett. 76 (1996) 4935
16. Pfeiffer R., Kuzmany H., Knoll P., Bokova S., Salk N., and Günther B. Diamond Relat. Mater. 12 (2003) 268
17. Leeds S.M., Davis T.J., May P.W., Pickard C.D.O., and Ashfold M.N.R. Diamond Relat. Mater. 7 (1998) 233
18. Liu Y.K., Liu C., Chen Y., Tzeng Y., Tso P.L., and Lin I.N. Diamond Relat. Mater. 13 (2004) 671
19. Temple P.A., and Hathaway C.E. Phys. Rev., B 7 (1973) 3685
20. Lombardi G., Hassouni K., Benedic F., Mohasseb F., Ropcke J., and Gicquel A. J. Appl. Phys. 96 (2004) 6739