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Volumn 56, Issue 2, 2007, Pages 1-4

Ceramic materials in microsystems technology

(1)  Bauer, W a  

a NONE

Author keywords

Ceramic injection moulding; Micro device; Microsystems technology

Indexed keywords

CHEMICAL RESISTANCE; HEAT RESISTANCE; MICROSYSTEMS; POLYMERS; SILICON; WEAR RESISTANCE;

EID: 34047266835     PISSN: 00205214     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (1)

References (18)
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    • Janas, V.E.1    Safari, A.2
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    • Hot embossing - The moulding technique for plastic microstructures
    • Heckele, M., Bacher, W., Blum, H., Müller, L.: Hot embossing - The moulding technique for plastic microstructures. Microsystem Technologies, 4 (1998) 122-124
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    • Heckele, M.1    Bacher, W.2    Blum, H.3    Müller, L.4
  • 10
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    • Knitter, R., Günther, E., Odemer, C.: Fabrication of microstructured ceramic layers by tape casting and subsequent stamping. In: P. Duran [Ed.]: Proc. of the 3rd Conf. of the European Ceramic Society, Madrid, E, September 13-17, 1993. S.I.: Faenza Editrice Iberica, 1993 Vol. 1, 555-560
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    • Bauer, W., Ritzhaupt-Kleissl, H.J., Hausselt, J.: Shaping of high aspect ratio ceramics by centrifugal casting. In: Michel, B., Winkler, T. (Ed.): MicroMat '97, Micro Materials, Berlin, 16.-18. April 1997, 1227-1229
    • Bauer, W., Ritzhaupt-Kleissl, H.J., Hausselt, J.: Shaping of high aspect ratio ceramics by centrifugal casting. In: Michel, B., Winkler, T. (Ed.): MicroMat '97, Micro Materials, Berlin, 16.-18. April 1997, 1227-1229
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    • von Both, H., Hausselt, J.: Ceramic microstructures by electrophoretic deposition of colloidal suspensions. In: Internat. Conf. on electrophoretic deposition: Fundamentals and applications, Banff, Canada, 18.-22.8.2002, J. of Electrochemical Soc.
    • von Both, H., Hausselt, J.: Ceramic microstructures by electrophoretic deposition of colloidal suspensions. In: Internat. Conf. on electrophoretic deposition: Fundamentals and applications, Banff, Canada, 18.-22.8.2002, J. of Electrochemical Soc.
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    • Bauer, W.1    Knitter, R.2
  • 17
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    • Auhorn, M.1    Kasanicka, B.2    Beck, T.3    Schulze, V.4    Löhe, D.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.