Replication techniques for ceramic microcomponents with high aspect ratios

Microsystem Technologies

Volumn 9, Issue 1-2, 2003, Pages 81-86

  Bauer, W ^a   Knitter, R ^a   Emde, A ^a   Bartelt, G ^a   Gohring D ^a   Hansjosten, E ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; COMPACTION; COMPRESSION MOLDING; ELASTICITY; INJECTION MOLDING; MATHEMATICAL MODELS; PRODUCT DEVELOPMENT; RAPID PROTOTYPING; RUBBER MOLDS; SILICONES; SURFACE ROUGHNESS;

LOW-PRESSURE INJECTION MOLDING (LPIM); MICROCOMPONENTS; REPLICATION TECHNIQUES; THERMAL COMPACTION;

COMPONENTS;

EID: 17444365109     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0200-z     Document Type: Article

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