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Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1349-1352
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Electrical and photocurrent analysis of Si-fluorine doped DLC films heterojunctions
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Author keywords
Diamond like carbon; Doping; Electrical properties; Photoconductivity
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Indexed keywords
DOPING (ADDITIVES);
ELECTRIC PROPERTIES;
FLUORINE;
MAGNETRON SPUTTERING;
PHOTOCURRENTS;
SILICON;
DIAMOND-LIKE CARBON;
FLUORINE CONCENTRATION;
GROWTH CONDITIONS;
DIAMOND LIKE CARBON FILMS;
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EID: 34047256420
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2006.11.020 Document Type: Article |
Times cited : (5)
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References (17)
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