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Volumn 201, Issue 16-17, 2007, Pages 7076-7082
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Thermal stability of reactive sputtered tungsten oxide coatings
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Author keywords
Reactive sputtering; Structural characterization; Thermal stability; Tungsten oxide
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Indexed keywords
ANNEALING;
CORROSION;
OXIDANTS;
REACTIVE SPUTTERING;
STRUCTURE (COMPOSITION);
THERMODYNAMIC STABILITY;
TUNGSTEN COMPOUNDS;
CHEMICAL COMPOSITION;
DC REACTIVE MAGNETRON SPUTTERING;
TUNGSTEN OXIDE;
INORGANIC COATINGS;
ANNEALING;
CORROSION;
INORGANIC COATINGS;
OXIDANTS;
REACTIVE SPUTTERING;
STRUCTURE (COMPOSITION);
THERMODYNAMIC STABILITY;
TUNGSTEN COMPOUNDS;
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EID: 34047256096
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.01.019 Document Type: Article |
Times cited : (18)
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References (19)
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