Influences of oxygen on the formation and stability of A15 β-W thin films

Materials Science and Engineering A

Volumn 284, Issue 1-2, 2000, Pages 176-183

  Shen, Y G ^a   Mai, Y W ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

A15 W thin films; Electron energy loss spectrometry; Oxygen; Sputtering deposition; Tungsten; X ray photoelectron spectroscopy

Indexed keywords

BODY CENTERED CUBIC; ENERGY FILTERED ELECTRON DIFFRACTION; TUNGSTEN FILMS;

ANNEALING; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; ELECTRON ENERGY LOSS SPECTROSCOPY; MAGNETRON SPUTTERING; OXYGEN; PHASE TRANSITIONS; SPUTTER DEPOSITION; TUNGSTEN; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILMS;

EID: 0033742236     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(00)00745-0     Document Type: Article

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