Conformal coating of organic dielectric film on gold electrodes in microelectromechanical system devices by electrodeposition

IEEJ Transactions on Sensors and Micromachines

Volumn 127, Issue 4, 2007, Pages

  Sakata, Tomomi ^a   Okabe, Yuichi ^a   Kuwabara, Kei ^a   Sato, Norio ^a   Kudou, Kazuhisa ^a   Machida, Katsuyuki ^a   Ishii, Hiromu ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Anti sticking; Conformal; Electrodeposition; Gold; MEMS; Organic dielectric film

Indexed keywords

DIELECTRIC FILMS; ELECTRODEPOSITION; ELECTRODES; GOLD; GROWTH (MATERIALS); MICROELECTROMECHANICAL DEVICES; SURFACE TREATMENT;

ANTI-STICKING; GOLD ELECTRODES; GOLD OXIDES; ORGANIC DIELECTRIC FILMS;

COATINGS;

EID: 34047251831     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.127.253     Document Type: Article

References (9)

1. M. Takeda : "Applications of MEMS to Industrial Inspection", Proc. IEEE Micro Electro Mechanical Systems, pp.182-191, Interlaken, Switzerland (2001)
2. Y. Nemirovsky and O. Bochobza : "A Methodology and Model for the Pull-In Parameters of Electrostaic Actuators", J. Microelectromech. Syst., Vol.10, pp.601-615 (2001)
3. th Annual International Reliability Physics Symposium, pp. 129-138, San Jose, USA (2000)
4. M. R. Houston, R. Maboudian, and R. T. Howe, Proc : "Self-assembled Monolayer Films as Durable Anti-Stiction Coating for Polysilicon Microstructures", Proc. IEEE Solid-State Sensor and Actuator Workshop, pp.42-47, Hilton Head, USA (1996)
5. T. Sakata, H. Ishii, Y. Okabe, N. Sato, M. Nagase, T. Kamei, K. Kudou, M. Yano, and K. Machida : "Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures", IEEJ Trans. SM, Vol.126, pp.14-18, Kyoto, Japan (2006)
6. T. Sakata, H. Ishii, Y. Okabe, M. Nagase, T. Kamei, K. Kudou, M. Yano. and K. Machida : "Ami-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures, Jpn. J. Appl. Phys., Vol.44, pp.5732-5735 (2005)
7. I. Kawakami : "Electrolyzed Activate Insulation Electro Coating System". Techno-Cosmos, Vol.16, pp.72-73 (2003)
8. T. Sakata, H. Ishii, N. Sato, T. Shimamura, K. Kuwabara, K. Kudou, and K. Machida : "Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices", Jpn. J. Appl. Phys. Vol.45, pp.5646-5649 (2006)
9. K. Ogura, S. Haruyama, and K. Nagasaki : "The Electrochemical Oxidation and Reduction of Gold", J. Electrochem. Soc., Vol.118, pp.531-535 (1971)