Single-mass 6-DOF isotropic accelerometer with segmented PSD sensors

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 558-569

  Chapsky, Vladimir ^a   Portman, Vladimir T ^a   Sandler, Ben Zion ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

6 DOF accelerometer; Design isotropy; Inertial measurement unit; Single proof mass

Indexed keywords

ACCELEROMETERS; ALGORITHMS; DEGREES OF FREEDOM (MECHANICS); LIGHT SOURCES;

DESIGN ISOTROPY; INERTIAL MEASUREMENT UNIT; ISOTROPIC ACCELEROMETERS; SINGLE PROOF MASS;

OPTICAL SENSORS;

EID: 34047132928     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.024     Document Type: Article

References (18)

1. Crossbow Technology, Inc., IMU Family Data Sheets, 2004. http://www.xbow.com/Products/productsdetails.aspx?sid=27.
2. InertiaCube2 TM, Manual 1, InterSense Inc., Doc. No. 072-IC210-0J01.
3. Systems & Processes Engineering Corporation, Tornado6DOF, Data Sheet, http://www.onboardsys.com/products_6dof.html, in press.
4. Lu C., Lemkin M., and Boser B. A monolithic surface micromachined accelerometer with digital output. IEEE J. Solid-State Circuits 30 (1995) 1367-1373
5. Juneau T., Pisano A.P., and Smith J.H. Dual axis operation of a micromachined rate gyroscope. Tech. Dig. 9th International Conference on Solid-State Sensors and Actuators (Transducers'97). Chicago, IL, June (1997) 883-886
6. Yazdi N., Ayazi F., and Najafi K. Micromachined Inertial Sensors. Proc. IEEE 86 8 (1998)
7. Lemkin M., Boser B., and Smith J. A 3-axis surface micro-machined accelerometer. Tech. Digest Int. Solid State Circuits Conf. (ISSCC'97). San Francisco, CA (1997) 202-203
8. Alfano J.P., and Masory O. Design of a MEMS Six DOF Accelerometer. Florida Conference on Recent Advances in Robotics Session 6. Mechanical Engineering Department (1999), Florida Atlantic University. http://www.me.ufl.edu/FLA99/session6/Masory_MEMS.PDF http://www.me.ufl.edu/FLA99/session6/Masory_MEMS.PDF
9. Liu S.A., and Tzo H.L. A novel six-component force sensor of good measurement isotropy and sensitivities. Sens. Actuators A100 (2002) 223-230
10. Zhenlin J., Feng G., and Xiaohui Z. Design and analysis of a novel isotropic six-component force/torque sensor. Sens. Actuators A109 (2003) 17-20
11. Abbaspour-Sani E., Huang R., and Kwok C.Y. A novel optical accelerometer. IEEE Electron Device Lett. 16 5 (1995) 166-168
12. Ohkawa M., Izutsu M., and Sueta T. Integrated optic accelerometer employing a cantilever on silicon substrate. Japanese Journal of Applied Physics 28 2 (1989) 287-288
13. Kalenik J., and Pajak R. A cantilever optical-fiber accelerometer. Sens. Actuators A 68 (1998) 350-355
14. Pestel E.C., and Leckie F.A. Matrix Methods in Elastomechanics (1963), McGraw-Hill, New York 287, chapter 10
15. Portman V.T., Sandler B.-Z., and Zahavi E. Rigid 6 × 6 parallel platform for precision 3-D micromanipulation: theory and design application. IEEE Trans. Robot. Automat. 16 6 (2000) 629-643
16. Optoelectronic Component Catalog (2003), UDT Sensors, Inc
17. Harris C.M., and Crede C.E. Shock and Vibration Handbook, R. E. Blake Basic Vibration Theory. 5th ed. (2002), McGraw-Hill, New York Chapter 2
18. ON-TRAK Photonics, Inc. Application Notes, "Position Sensing Detectors: Theory of Operation" http://www.on-trak.com/index.html.