Electromagnetic actuation for MOEMS, examples, advantages and drawbacks of MAGMAS

Journal of Magnetism and Magnetic Materials

Volumn 242-245, Issue , 2002, Pages 1119-1125

  Reyne, Gilbert ^a,b  

^a ENSIEG   (France)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Bi stability; MAGMAS; Magnetic scanners; Magnetostriction; Micro magnetic structures; Microstructures; Optical cross connect; Permalloy thin films

Indexed keywords

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MAGNETOSTRICTION; MICROSTRUCTURE; OPTIMIZATION; THIN FILMS;

ELECTROMAGNETIC ACTUATION;

ELECTROMAGNETISM;

EID: 0036543612     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(01)00981-7     Document Type: Article

References (36)

1. Self-aligned vertical mirrors and V-grooves for magnetic micro optical matrix switch
2. Self-aligned vertical mirrors and v-grooves applied to a self-latching matrix switch for optical networks
3. Anovel optical scanner with integrated two-dimensional magnetostrictive actuation and two-dimensional piezoresistive detection
4. Micro actuator principles
5. Design of very small electromagnetic and electrostatic micro actuators
6. Closed loop controlled, large throw, magnetic linear microactuator with 1000/spl mu/m structural height
7. Magnetic microactuators fabricated by the LIGA-technique for large displacements or large forces
8. The two-dimensional micro conveyer, Principles and fabrication process of the actuator
9. Latching micro magnetic relays with multistrip permalloy cantilevers
10. Single flux-path bidirectional linear actuators
11. Modeling and optimization of bi-stable optical switch
12. A proportional microvalve using a bi-stable magnetic actuator
13. Asilicon micromachined magnetic actuator using a two layer electroplating process
14. An electromagnetic MEMS 2*2 fiber optic bypass switch
15. High-speed resonant Si microscanner with magnetic actuation
16. Micromachined optical scanner for string diameter measurement system
17. Monolithic, single crystal silicon, vertical mirrors arrays with improved integration density for optical crossconnects
18. A novel piezoresistor-bridge configuration for the simultaneous detection of bending and torsion modes. Application to two-dimensional optical microscanner
19. Torsion-Based, Drift-free magnetostrictive microactuator