SCOPUS 정보 검색 플랫폼

Volumn 917, Issue , 2006, Pages 125-130

Silicate formation at the interface of hlgh-k dielectrics and Si(001) surfaces

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL STATE INFORMATION; TOTAL ELECTRON YIELD; X-RAY ABSORPTION SPECTROSCOPY;

DIELECTRIC MATERIALS; FLUORESCENCE; GATE DIELECTRICS; INTERFACES (MATERIALS); PHOTOELECTRON SPECTROSCOPY; SILICON;

SILICATES;

EID: 33947637868 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (2)

References (14)

1
- 0035872897
- G.D.Wilk, R.M. Wallace, J.M.Anthony, J.Appl.Phys.89 (2001) 5243;
- (2001) J.Appl.Phys , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

2
- 0037495724
- R.M.C.Almeida, I.J.R.Baimvol, Surf.Sci.Rep.49 (2003)1.
- (2003) Surf.Sci.Rep , vol.49 , pp. 1
- Almeida, R.M.C.¹ Baimvol, I.J.R.²

3
- 0142186263
- D.Schmeißer, Materials Science in Semiconductor Processing 6 (2003)59.
- (2003) Materials Science in Semiconductor Processing , vol.6 , pp. 59
- Schmeißer, D.¹

4
- 33947669680
- D. Schmeißer, F. Zheng, V. Perez-Dieste, F. J. Himpsel, R. LoNigro, R. G. Toro, G. Malandrino, I. L. Fragalà, Materials Science and Engineering C (2005), in press.
- D. Schmeißer, F. Zheng, V. Perez-Dieste, F. J. Himpsel, R. LoNigro, R. G. Toro, G. Malandrino, I. L. Fragalà, Materials Science and Engineering C (2005), in press.

5
- 0004237782
- Springer Verlag, Heidelberg
- J.Söhr: NEXAFS Spectroscopy, Springer Verlag, Heidelberg (1996).
- (1996) NEXAFS Spectroscopy
- Söhr, J.¹

6
- 33846175139
- E. Zschech, C. Whelan, T. Mikolajick Eds, Springer
- D.Schmeißer, P.Hoffmann, G.Beuckert, in E. Zschech, C. Whelan, T. Mikolajick (Eds.): Materials for Information Technology, Devices, Interconnects and Packaging, Series: Engineering Materials and Processes, pp. 449-460, Springer (2005).
- (2005) Materials for Information Technology, Devices, Interconnects and Packaging, Series: Engineering Materials and Processes , pp. 449-460
- Schmeißer, D.¹ Hoffmann, P.² Beuckert, G.³

7
- 2942642474
- Y.-Y.Luk, N.L.Abbott, J.N.Crain, F.J.Himpsel, Journal of Chemical Physics 120 (2004) 10792.
- (2004) Journal of Chemical Physics , vol.120 , pp. 10792
- Luk, Y.Y.¹ Abbott, N.L.² Crain, J.N.³ Himpsel, F.J.⁴

8
- 20844450216
- V.PerezDieste, J.N.Crain,A.Kirakosian, J.L.McChesney,E.Arenholz, A.T.Young, J.D.Denlinger, D.L.Ederer, T.A.Callcott, S.A.Lopez-Rivera, Physical Review B 70 (2004) 085205.
- (2004) Physical Review B , vol.70 , pp. 085205
- PerezDieste, V.¹ Crain, J.N.² Kirakosian, A.³ McChesney, J.L.⁴ Arenholz, E.⁵ Young, A.T.⁶ Denlinger, J.D.⁷ Ederer, D.L.⁸ Callcott, T.A.⁹ Lopez-Rivera, S.A.¹⁰

9
- 33947627965
- to be published
- D.Schmeißer, F.Zheng, F.J.Himpsel,E.Zschech, to be published.
- Schmeißer, D.¹ Zheng, F.² Himpsel, F.J.³ Zschech, E.⁴

10
- 9544230715
- D.Schmeißer, H.-J.Müssig, Materials Science in Semiconductor Processing 7/4-6 (2004) 221.
- (2004) Materials Science in Semiconductor Processing , vol.7 , Issue.4-6 , pp. 221
- Schmeißer, D.¹ Müssig, H.J.²

11
- 0442295425
- D.Schmeißer, H.-J.Müssig, J.Physics: Condensed Matter 16 (2004) S153.
- (2004) J.Physics: Condensed Matter , vol.16
- Schmeißer, D.¹ Müssig, H.J.²

12
- 33947689513
- Volume 811
- in press
- D.Schmeißer, H.-J.Müssig, MRS, Volume 811, in press.
- Schmeißer, D.¹ Müssig, H.-J.² MRS³

14
- 33947636448
- American Institute of Physics (AIP)
- submitted
- D. Schmeißer, H.-J. Müssig, American Institute of Physics (AIP), submitted.
- Schmeißer, D.¹ Müssig, H.-J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.