Mechanical and corrosive behavior of Ti/TiN multilayer films with different modulation periods

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 411-415

  Zhang, Q ^a   Leng, Y X ^a   Qi, F ^a   Tao, T ^a   Huang, N ^a  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Multilayer films; Titanium; Titanium nitride

Indexed keywords

CORROSION RESISTANCE; MAGNETRON SPUTTERING; MICROHARDNESS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

SLIDING WEAR BEHAVIOR; VAPOR AMBIENCE;

MULTILAYER FILMS;

EID: 33947637582     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.085     Document Type: Article

References (11)

1. Chen Y.-H., Lee K.W., Chiou W.-A., Chung Y.-W., and Keer L.M. Surf. Coat. Technol. 146 (2001) 209
2. Li T.S., Li H., and Pan F. Surf. Coat. Technol. 137 (2001) 225
3. Thobor A., Rousselot C., and Clement C. Surf. Coat. Technol. 124 (2000) 210
4. Barshilia H.C., Surya Prakash M., Poojari A., and Rajam K.S. Thin Solid Films 460 (2004) 133
5. Carrasco C., Segers L., and Benavente B. J. Mater. Process. Technol. 145 (2004) 371
6. Pan W.-L., Yu G.-P., and Huang J.-H. Surf. Coat. Technol. 110 (1998) 111
7. Rawdanowicz T.A., Godbole V., Narayan J., Sankar J., and Sharma A. Compos.: Part B 30 (1999) 657
8. Sundgren J.-E., and Hentzell H.T.G. J. Vac. Sci. Technol. A 5 (1986) 2259
9. Andrade E., Flores M., Muhl S., Barradas N.P., Murillo G., Zavala E.P., and Rocha M.F. Nucl. Instr. and Meth. B 219-220 (2004) 63
10. Hubler R. Surf. Coat. Technol. 116-119 (1999) 1116
11. Ries L.A.S., Asambuja D.S., and Baumvol I.J.R. Surf. Coat. Technol. 89 (1997) 114