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Surface and Coatings Technology

Volumn 137, Issue 2-3, 2001, Pages 225-229

Microstructure and nanoindentation hardness of Ti/TiN multilayered films

(3) Li, T S a Li, H a Pan, F a

a TSINGHUA UNIVERSITY (China)

Author keywords

Hardness enhancement; Microstructure; Ti TiN multilayers

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; METALLOGRAPHIC MICROSTRUCTURE; MULTILAYERS; TITANIUM COMPOUNDS;

NANOINDENTATION HARDNESS; REACTIVE MAGNETRON SPUTTERING;

PROTECTIVE COATINGS;

COATING; CORROSION PROTECTION; HARDNESS; TITANIUM NITRIDE; WEAR PREVENTION;

EID: 0035868246 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)01096-3 Document Type: Article

Times cited : (72)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.