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International Journal of Mass Spectrometry and Ion Processes

Volumn 171, Issue 1-3, 1997, Pages 83-93

Dissociative ionization of silane by electron impact

(5) Basner, R a Schmidt, M a Tarnovsky, V b Becker, K b,d Deutsch, H c

a Inst F Niedertemperatur P (Germany)

b CITY COLLEGE OF NEW YORK (United States)

c UNIVERSITY OF GREIFSWALD (Germany)

d Stevens Institute of Technology (United States)

Author keywords

Cross sections; Electron impact ionization; Plasma processing

Indexed keywords

EID: 30844437673 PISSN: 01681176 EISSN: None Source Type: Journal
DOI: 10.1016/s0168-1176(97)00063-3 Document Type: Article

Times cited : (63)

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