A room temperature Si3N4/SiO2 membrane-type electrical substitution radiometer using thin film platinum thermometers

Measurement Science and Technology

Volumn 18, Issue 1, 2007, Pages 183-189

  Allegre G ^a   Guillet, B ^a   Robbes, D ^a   Mechin L ^a   Lebargy, S ^a   Nicoletti, S ^b  

^a UNIVERSITÉ DE CAEN   (France)

^b CNR   (Italy)

Author keywords

Bolometer applications; External electronic feedback; Heat feedback; Infrared; Membrane micromaching; Metrology; Microtechnologies; Radiometry; Temperature, radiation

Indexed keywords

BANDWIDTH; HEAT SINKS; JOULE HEATING; RADIOMETRY; THIN FILMS; VACUUM;

BOLOMETER APPLICATIONS; EXTERNAL ELECTRONIC FEEDBACK; HEAT FEEDBACK; MEMBRANE MICROMACHING;

THERMOMETERS;

BANDWIDTH; HEAT SINKS; JOULE HEATING; RADIOMETRY; THERMOMETERS; THIN FILMS; VACUUM;

EID: 33947629237     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/1/023     Document Type: Conference Paper

References (23)

1. Hoyt C C and Foukal P V 1991 Cryogenic radiometers and their application to metrology Metrologia 28 163-7
2. Fox N P 2000 Primary radiometric quantities and units Metrologia 37 507-3
3. Parr A C 1996 A national measurement system for radiometry, photometry, and pyrometry based upon absolute detectors NIST Tech Note 1421
4. Rice J P, Lorentz S R, Datla R U, Vale L R, Rudman D A, Lam Chok Sing M and Robbes D 1998 Active cavity absolute radiometer based on high Tc superconductors Metrologia 35 289-93
5. Dratler J Jr 1974 A proportional thermostat with 10 microdegree stability Rev. Sci. Instrum. 45 1435-44
6. Sarid D and Cannell D S 1974 A 15 microdegree temperature controller Rev. Sci. Instrum. 45 1082-8
7. Grubic M and Würz U 1978 High-precision low-cost temperature controller J. Phys. E: Sci. Instrum. 11 692-6
8. Madhavan Unni P K, Gunasekaran M K and Kumar A 2003 30 νK temperature controller from 25 to 103 °C: study and analysis Rev. Sci. Instrum. 74 231-42
9. Richards P L 1994 Bolometers for infrared and millimeter waves J. Appl. Phys. 76 1-24
10. Rice J P and Zhang Z M 1996 Liquid-nitrogen-cooled high-Tc electrical substitution as a broadband IR transfer standard NIST Tech. Rep. 1414
11. Martin J, Fox N and Key P 1985 A cryogenic radiometer for absolute radiometric measurements Metrologia 21 147-55
12. Guillet B, Robbes D and Méchin L 2003 YBCO transition edge sensors used for very low noise thermal control IEEE Trans. Appl. Supercond. 13 657-60
13. Baroncini M, Placidi P, Scorzoni A, Cardinali G C, Dori L and Nicoletti S 2001 Accurate extraction of the temperature of the heating element in macromachined gas sensors Proc. IEEE Int. Symp. on Circuits and Systems (ISCAS)
14. 2 thin films deposited by the pulsed laser ablation Sensors Actuators B 60 90-6
15. Routoure J-M, Méchin L and Flament S 2005 Progress toward 'optical beam induces noise' measurement set-up AIP Series of Conf. Proc., ICNF2005 pp 681-4
16. Cheenne N, Robbes D, Maneval J P, Flament S, Mercey B, Hamet J F and Méchin L 2000 (YBCO/STO)n multi-layers: a way to avoid substrate micromachining of microbolometers Inst. Phys. Conf. Ser. 167 695-8
17. Guillet B, Robbes D and Méchin L 2003 Low noise temperature control: application to an active cavity radiometer Rev. Sci. Instrum. 74 243-9
18. Simon I, Brsan N, Bauer M and Weimar U 2001 Micromachined metal oxide gas sensors: opportunities to improve sensor performance Sensors Actuators B 73 1-26
19. Scorzoni A, Baroncini A and Placidi P 2004 On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors Sensors Actuators A 116 137-44
20. Baroncini M, Placidi P, Cardinali G C and Scorzoni A 2004 Thermal characterization of a microheater for micromachined gas sensors Sensors Actuators A 115 8-14
21. Motchenbacher C and Connelly J 1993 Low Noise Electronic System Design (New York: Wiley)
22. 3 thermometers for uncooled bolometric applications J. Appl. Phys. 99 024903
23. 3 thin film Appl. Phys. Lett. 87 204103