Dielectric and thermal properties of AlN ceramics

Journal of the European Ceramic Society

Volumn 27, Issue 8-9 SPEC. ISS., 2007, Pages 2967-2971

  Kume, Shoichi ^a   Yasuoka, Masaki ^a   Lee, Sang Kee ^a   Kan, Akinori ^b   Ogawa, Hirotaka ^b   Watari, Koji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b MEIJO UNIVERSITY   (Japan)

Author keywords

Dielectric properties; Nitrides; Sintering; Thermal conductivity

Indexed keywords

ALUMINUM COMPOUNDS; ANNEALING; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES; NITRIDES; SINTERING; THERMAL CONDUCTIVITY; THERMODYNAMIC PROPERTIES;

NITROGEN FLOWING ATMOSPHERE;

CERAMIC MATERIALS;

ALUMINUM COMPOUNDS; ANNEALING; CERAMIC MATERIALS; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES; NITRIDES; SINTERING; THERMAL CONDUCTIVITY; THERMODYNAMIC PROPERTIES;

EID: 33947614200     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.11.023     Document Type: Article

References (26)

1. Heidinger R., and Nazare S. Influence of porosity on the dielectric properties of AlN in the range of 30 ... 40 GHz. Powder Metall. Int. 20 (1988) 30-32
2. Enck, R. C., Harris, J. H., Youngman, R. A. and Nemecek, T. S., Process for making a low electrical resistively, high purity aluminum nitride electrostatic chuck, US Patent No. 6,017,485, January 25, 2000.
3. Gonzalez M., and Ibarra A. The dielectric behavior of commercial polycrystalline aluminium nitride. Diamond Relat. Mater. 9 (2000) 467-471
4. Fesenko I.P., and Kuzenkova M.A. Low dielectric loss ceramics of AlN fine and nanopowders. Powder Metall. Met. Ceram. 41 (2002) 567-569
5. Nishizono, K. and Oh, U., Radio wave transmittal substance and production method thereof, Japan Kokai Tokkyo Koho, Toku-Kai 2001-181049, July 3, 2001.
6. Kasugai A., Sakamoto K., Takahashi K., Tsuneoka M., Kariya T., Imai T., et al. Chemical vapor deposition diamond window for high-power and long pulse millimeter wave transmission. Rev. Sci. Inst. 69 (1998) 2160-2165
7. Brandon J.R., Coe S.E., Sussmann R.S., Sakamoto K., Spörl R., Heidinger R., et al. Development of CVD diamond r.f. windows for ECRH. Fusion Eng. Des. 53 (2001) 553-559
8. Alford N.M., Breeze J., Wang X., Penn S.J., Dalla S., Webb S.J., et al. Dielectric loss of oxide single crystals and polycrystalline analogues from 10 to 320 K. J. Eur. Ceram. Soc. 21 (2001) 2605-2611
9. Tajima, K. and Uchimura, H., Microwave window substance, Japan Kokai Tokkyo Koho, Toku-Kai-Hei 8-295567, November 12, 1996.
10. Watari K., Hwang H.J., Toriyama M., and Kanzaki S. Effective sintering aids for low-temperature sintering of AlN ceramics. J. Mater. Res. 14 (1999) 1409-1417
11. Jackson T.B., Virkar A.V., More K.L., Dinwiddie Jr. R.B., and Culter R.A. High-thermal-conductivity aluminum nitride ceramics: the effect of thermodynamic, kinetic, and microstructural factors. J. Am. Ceram. Soc. 80 (1997) 1421-1435
12. 3 ceramics. J. Eur. Ceram. Soc. 20 (2000) 1319-1325
13. Nakano H., Watari K., Hayashi H., and Urabe K. Microstructural characterization of high-thermal-conductivity aluminum nitride ceramic. J. Am. Ceram. Soc. 85 (2002) 3093-3095
14. Koyama, T. and Ishii, M., Corrosion-resistant substance for plasma and production method thereof, Japan Kokai Tokkyo Koho, Toku-Kai 2001-233676, August, 28, 2001.
15. Koyama T., Iguchi M., and Ishii M. Lowering of dielectric loss in AlN ceramics. Taiheiyo Semento Kenkyu Hokoku 142 (2002) 78-82
16. Penn S.J., Alford N.M., Templeton A., Wang X., Xu M., Reece M., et al. Effect of porosity and grain size on the microwave dielectric properties of sintered alumina. J. Am. Ceram. Soc. 80 (1997) 1885-1888
17. Kim W.-J., Kim D.K., and Kim C.H. Morphological effect of second phase on the thermal conductivity of AlN ceramics. J. Am. Ceram. Soc. 79 (1996) 1066-1072
18. Kume S., Yasuoka M., Omura N., and Watari K. Effects of annealing on dielectric loss and microstructure of aluminum nitride ceramics. J. Am. Ceram. Soc. 88 (2005) 3229-3231
19. Kume S., Yasuoka M., Omura N., and Watari K. Annealing effect on dielectric property of AlN ceramics. J. Eur. Ceram. Soc. 26 (2006) 1831-1834
20. Hakki B.W., and Coleman P.D. A dielectric resonator method of measuring inductive in the millimeter range. IRE Trans. Microwave Theory Tech. MTT-8 (1960) 402-410
21. Mizutani N., and Shinozaki K. Sinetring of AlN-densification, grain growth and removal of grain boundary phase. Ceramics 26 (1991) 738-743
22. Virkar A.V., Barrett T., Raymond J., and Cutler A. Thermodymanic and kinetics of oxygen removal on the thermal conductivity of aluminum nitride. J. Am. Ceram. Soc. 72 (1989) 2031-2042
23. Noguchi, T. and Mizuno, M. Kogyo Kogaku Zashi, 1967, 70, 839, Phase Diagrams for Ceramists Fig. 4370.
24. Aggarwal R.L., Ripin D.J., Ochoa J.R., and Fan T.Y. Measurement of thermo-optic properties of Y3Al5O12, Lu3Al5O12, YAIO3, LiYF4, LiLuF4, BaY2F8, KGd(WO4)2, and KY(WO4)2 laser crystals in the 80-300 °K temperature range. J. Appl. Phys. 98 (2005) 103514-1-14
25. Harima H. Properties of GaN and related compounds studied by means of Raman scattering. J. Phys. Condens. Matter 14 (2002) R967-R993
26. Krupka J., Derzakowski K., Tobar M., Hartnett J., and Geyer R.G. Complex permittivity of some ultralow loss dielectric crystals at cryogenic temperatures. Meas. Sci. Technol. 10 (1999) 387-392