Annealing effect on dielectric property of AlN ceramics

Journal of the European Ceramic Society

Volumn 26, Issue 10-11, 2006, Pages 1831-1834

  Kume, Shoichi ^a   Yasuoka, Masaki ^a   Omura, Naoki ^a   Watari, Koji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Annealing; Dielectric properties; Nitrides; Sintering

Indexed keywords

ANNEALING; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES OF SOLIDS; HIGH TEMPERATURE EFFECTS; SINTERING;

ANNEALING EFFECT; RELATIVE DENSITY;

ALUMINUM NITRIDE;

ALUMINUM NITRIDE; ANNEALING; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES OF SOLIDS; HIGH TEMPERATURE EFFECTS; SINTERING;

EID: 33645534800     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.09.009     Document Type: Conference Paper

References (15)

1. R. Heidinger S. Nazare Influence of porosity on the dielectric properties of AlN in the range of 30... 40 GHz Powder Metall. Int. 20 1988 30-32
2. Enck, R. C., Harris, J. H., Youngman, R. A. and Nemecek, T. S., Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck. US Patent No. 6,017,485, January 25, 2000.
3. M. Gonzalez A. Ibarra The dielectric behavior of commercial polycrystalline aluminium nitride Diamond Relat. Mater. 9 2000 467-471
4. I.P. Fesenko M.A. Kuzenkova Low dielectric loss ceramics of AlN fine and nanopowders Powder Metall. Met. Ceram. 41 2002 567-569
5. Nishizono, K. and Oh, U., Radio wave transmittal substance and production method thereof. Japan Kokai Tokkyo Koho, Toku-Kai2001-181049, July 3, 2001.
6. N.M. Alford J. Breeze X. Wang S.J. Penn S. Dalla S.J. Webb N. Ljepojevic X. Aupi Dielectric loss of oxide single crystals and polycrystalline analogues from 10 to 320 K J. Eur. Ceram. Soc. 21 2001 2605-2611
7. Tajima, K. and Uchimura, H., Microwave window substance. Japan Kokai Tokkyo Koho, Toku-Kai-Hei8-295567, November 12, 1996.
8. G.A. Slack R.A. Tanzilli R.O. Pohl J.W. Vandersande The intrinsic thermal conductivity of AIN J. Phys. Chem. Solids 48 1987 641-647
9. K. Watari H.J. Hwang M. Toriyama S. Kanzaki Effective sintering aids for low-temperature sintering of AlN ceramics J. Mater. Res. 14 1999 1409-1417
10. Koyama, T. and Ishii, M., Corrosion-resistant substance for plasma and production method thereof. Japan Kokai Tokkyo Koho, Toku-Kai 2001-233676, August 28, 2001.
11. T. Koyama M. Iguchi M. Ishii Lowering of dielectric loss in AlN ceramics Taiheiyo Semento Kenkyu Hokoku 142 2002 78-82
12. N. Mizutani K. Shinozaki Sinetring of AlN-densification, grain growth and removal of grain boundary phase Ceramics 26 1991 738-743
13. A.V. Virkar T.B. Jackson R.A. Cutler Thermodynamic and kinetic effects of oxygen removal on the thermal conductivity of aluminum nitride J. Am. Ceram. Soc. 72 1989 2031-2042
14. K. Watari M. Brito M. Yasuoka M.C. Valecillos K. Kanzaki Influence of powder characteristics on sintering process and thermal conductivity of aluminum nitride ceramics J. Ceram. Soc. Jpn. 103 1995 891-900
15. W.-J. Kim D.K. Kim C.H. Kim Morphological effect of second phase on the thermal conductivity of AlN ceramics J. Am. Ceram. Soc. 79 1996 1066-1072