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Volumn 54, Issue 6, 2006, Pages 2699-2705

Multiwafer vertical interconnects for three-dimensional integrated circuits

Author keywords

Integrated circuit packaging; Microstrip line; Vertical interconnects

Indexed keywords

INTEGRATED CIRCUIT PACKAGING; MULTIWAFER VERTICAL INTERCONNECTS; RETURN LOSSES;

EID: 33947402291     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2006.874867     Document Type: Article
Times cited : (9)

References (11)
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    • G. P. Gauthier, L. P. B. Katehi, and G. M. Rebeiz, "W-band finite ground, coplanar waveguide (FGGPW) to microstrip line transition," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 1998, vol. 1, pp. 107-109.
    • (1998) IEEE MTT-S Int. Microw. Symp. Dig , vol.1 , pp. 107-109
    • Gauthier, G.P.1    Katehi, L.P.B.2    Rebeiz, G.M.3
  • 4
    • 0029504850 scopus 로고
    • New uniplanar transitions for circuit and antenna applications
    • Dec
    • N. I. Dib, R. N. Simons, and L. P. B. Katehi, "New uniplanar transitions for circuit and antenna applications," IEEE Trans. Microw. Theory Tech., vol. 43, no. 12, pp. 2868-2873. Dec. 1995.
    • (1995) IEEE Trans. Microw. Theory Tech , vol.43 , Issue.12 , pp. 2868-2873
    • Dib, N.I.1    Simons, R.N.2    Katehi, L.P.B.3
  • 6
    • 33847154061 scopus 로고    scopus 로고
    • Low loss multi-wafer vertical interconnects for three dimensional integrated circuits
    • Paris, France, Oct
    • R. R. Lahiji, K. J. Herrick, S. Mohammadi, and L. P. B. Katehi, "Low loss multi-wafer vertical interconnects for three dimensional integrated circuits," in Proc. 35th Eur. Microw. Conf., Paris, France, Oct. 2005, vol. 1, pp. 177-180.
    • (2005) Proc. 35th Eur. Microw. Conf , vol.1 , pp. 177-180
    • Lahiji, R.R.1    Herrick, K.J.2    Mohammadi, S.3    Katehi, L.P.B.4
  • 7
    • 0032136370 scopus 로고    scopus 로고
    • Wafer-to-wafer bonding for microstructure formation
    • Aug
    • M. A. Schmidt, "Wafer-to-wafer bonding for microstructure formation," Proc. IEEE, vol. 86, no. 8, pp. 1575-1585, Aug. 1998.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1575-1585
    • Schmidt, M.A.1
  • 8
    • 0016569785 scopus 로고
    • Characterization of gold-gold thermocompression bonding
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    • N. Ahmed and J. J. Svitak, "Characterization of gold-gold thermocompression bonding," Solid-Stale Technol., pp. 25-32, Nov. 1975.
    • (1975) Solid-Stale Technol , pp. 25-32
    • Ahmed, N.1    Svitak, J.J.2
  • 10
    • 33947355242 scopus 로고    scopus 로고
    • Ansoft HFSS. ver. 9.1, Ansoft Corporation, Pittsburgh, PA, 2003
    • Ansoft HFSS. ver. 9.1, Ansoft Corporation, Pittsburgh, PA, 2003.
  • 11
    • 2942511587 scopus 로고    scopus 로고
    • Fabrication and accelerated hermeticity testing of an on-wafer package for RF MEMS
    • Jun
    • A. Margomenos and L. P. B. Katehi, "Fabrication and accelerated hermeticity testing of an on-wafer package for RF MEMS," IEEE Trans. Microw. Theory Tech., vol. 52, no. 6, pp. 1626-1636, Jun. 2004.
    • (2004) IEEE Trans. Microw. Theory Tech , vol.52 , Issue.6 , pp. 1626-1636
    • Margomenos, A.1    Katehi, L.P.B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.