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Volumn 1, Issue , 2005, Pages 177-180

Low loss multi-wafer vertical interconnects for three dimensional integrated circuits

Author keywords

Integrated circuit packaging; Microstrip line; Vertical interconnects

Indexed keywords

INTEGRATED CIRCUIT PACKAGING; MICROSTRIP-BASED CIRCUIT ARCHITECTURE; MULTI-WAFER VERTICAL INTERCONNECT; VERTICAL INTERCONNECTS;

EID: 33847154061     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2005.1608822     Document Type: Conference Paper
Times cited : (1)

References (9)
  • 6
    • 0032136370 scopus 로고    scopus 로고
    • wafer-to-wafer bonding for micro structure formation
    • August
    • M.A. Schmidt, "wafer-to-wafer bonding for micro structure formation," Proc. IEEE, pp. 1575-1585, August 1998.
    • (1998) Proc. IEEE , pp. 1575-1585
    • Schmidt, M.A.1
  • 7
    • 0016569785 scopus 로고
    • Characterization of gold-gold thermocompression bonding
    • November
    • N. Ahmed, J.J. Svitak, "Characterization of gold-gold thermocompression bonding," Solid-State Technology, pp. 25-32, November 1975.
    • (1975) Solid-State Technology , pp. 25-32
    • Ahmed, N.1    Svitak, J.J.2
  • 9
    • 33847154249 scopus 로고    scopus 로고
    • Ansoft HFSS, V.9.1, Ansoft Corporation, Pittsburgh, PA, 2003.
    • Ansoft HFSS, V.9.1, Ansoft Corporation, Pittsburgh, PA, 2003.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.