Silicon micromachined interconnects for on-wafer packaging of MEMS devices

2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2001

Volumn , Issue , 2001, Pages 33-36

  Margomenos, A ^a   Peroulis, D ^a   Becker, J P ^a   Katehi, L P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

micromachining; packaging; RF MEMS switch

Indexed keywords

ELECTRIC SWITCHES; ELECTRONICS PACKAGING; FABRICATION; INTEGRATED CIRCUIT INTERCONNECTS; INTEGRATED CIRCUITS; MICROMACHINING; PACKAGING; SILICON; SILICON WAFERS;

FABRICATION PROCESS; FABRICATION TECHNIQUE; HIGHER FREQUENCIES; MICROMACHINED SILICON; ON-WAFER PACKAGES; RF TRANSITIONS; RF-MEMS SWITCHES; SIGNAL PROPAGATION;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 2942511301     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2001.942336     Document Type: Conference Paper

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