RF W-band wafer-to-wafer transition

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2000, Pages 73-76

  Herrick, Katherine J ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL SIGNALS; FINITE GROUND COPLANAR LINE; MULTIWAFER SILICON;

BONDING; CAPACITANCE; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; ELECTRIC IMPEDANCE; INSERTION LOSSES; MICROMACHINING; PERMITTIVITY; TRANSMISSION LINE THEORY; WAVEGUIDES;

SILICON WAFERS;

EID: 0033694610     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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