On the development of a mesoscale friction tester

Experimental Mechanics

Volumn 47, Issue 1, 2007, Pages 123-131

  Wang, M ^a   Xu, D ^b   Ravi Chandar, K ^b   Liechti, K M ^b  

^a INTEL CORPORATION   (United States)

^b The University of Texas at Austin   (United States)

Author keywords

AFM; Contact; Friction; MEMS; Mesoscale; NEMS; Tester

Indexed keywords

CONTACT RADII; MESOSCALE FRICTION TESTER;

MEMS; NEMS; PROBES; SURFACE ROUGHNESS;

FRICTION;

FRICTION; MEMS; NEMS; PROBES; SURFACE ROUGHNESS;

EID: 33947399697     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-006-0653-6     Document Type: Article

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