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Volumn 221, Issue 2, 2007, Pages 161-172

Physical properties of ultrafast deposited micro- and nanothickness amorphous hydrogenated carbon films for medical devices and prostheses

Author keywords

Cascaded arc plasma source; Diamond like hydrogenated carbon; Fast plasmaenhanced chemical vapour deposition; Hardness

Indexed keywords

AMORPHOUS FILMS; AUGER ELECTRON SPECTROSCOPY; DELAMINATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; PHYSICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROSTHETICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; X RAY SPECTROSCOPY; ACETYLENE; ADHESION; AMORPHOUS CARBON; ARGON; BIOMEDICAL EQUIPMENT; CARBON; DEPOSITION; DEPOSITION RATES; DIAMOND LIKE CARBON FILMS; ELECTRON SPECTROSCOPY; HYDROGENATION; LIGHTING; OPTICAL PROPERTIES; PLASMA SOURCES; SUBSTRATES;

EID: 33947363734     PISSN: 09544119     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544119JEIM149     Document Type: Article
Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.