Swift heavy ion induced modifications of silicon (sub) oxide nitride layer structures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 256, Issue 1, 2007, Pages 300-304

  Arnoldbik, W M ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Elastic recoil detection analysis; Permeability; Radiation damage; Radiation induced diffusion; Silicon nitride thin films; Silicon oxide

Indexed keywords

CHEMICAL MODIFICATION; HEAVY IONS; MAGNETIC PERMEABILITY; MOLECULAR STRUCTURE; RADIATION DAMAGE; SILICON NITRIDE; THIN FILMS;

ELASTIC RECOIL DETECTION ANALYSIS; HYDROGENATED ORGANIC MATERIALS; RADIATION INDUCED DIFFUSION; SILICON NITRIDE THIN FILMS;

SILICA;

EID: 33947225604     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.017     Document Type: Article

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