Loss of hydrogen from ion irradiated photoresist and a-C:H films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 846-850

  Baptista, D L ^a   Garcia, Irene T S ^b   Zawislak, F C ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b FEDERAL UNIVERSITY OF PELOTAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS MATERIALS; CARBON; ELASTICITY; ELECTRON TRANSITIONS; HYDROGEN; HYDROGENATION; ION BEAMS; IRRADIATION;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); NUCLEAR REACTION ANALYSIS (NRA);

PHOTORESISTS;

EID: 2342630507     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.174     Document Type: Conference Paper

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