Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal

Journal of Materials Processing Technology

Volumn 138, Issue 1-3, 2003, Pages 116-119

  Yuan, J L ^a   Zhao, P ^a   Ruan, J ^a   Cao, Z X ^a   Zhao, W H ^a   Xing, T ^a  

^a ZHEJIANG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Lapping and polishing; Quartz crystal; Super smooth surface

Indexed keywords

ABRASIVES; CRYSTALS; POLISHING; SURFACE ROUGHNESS;

QUARTZ CRYSTALS;

QUARTZ;

EID: 0038142382     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00058-X     Document Type: Conference Paper

References (2)

1. T. Kasai, K. Horio, T. Karaki-Doy, Ann. CIRP 39 (1) (1990).
2. J.L. Yuan, Z.F. Tong, SME MR 91-193, 1991.