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Volumn 65, Issue , 2006, Pages 157-167

A low voltage MEMS structure for RF capacitive switches

Author keywords

[No Author keywords available]

Indexed keywords


EID: 33947190408     PISSN: 10704698     EISSN: 15598985     Source Type: Journal    
DOI: 10.2528/pier06093001     Document Type: Article
Times cited : (41)

References (15)
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    • Petersen, K.E.1
  • 2
    • 0029543057 scopus 로고
    • A surface micromachined miniature switch for telecommunications applications with signal frequencies from Dc up to 4 GHz
    • Stockholm, Sweden, June 25-29
    • Yao, J. J. and M. F. Chang, "A surface micromachined miniature switch for telecommunications applications with signal frequencies from Dc up to 4 GHz," 8th Int. Solid-State Sensors and Actuators Eurosens. Conf., 384-387, Stockholm, Sweden, June 25-29, 1995.
    • (1995) 8th Int. Solid-State Sensors and Actuators Eurosens. Conf , pp. 384-387
    • Yao, J.J.1    Chang, M.F.2
  • 3
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    • Yao, Z. J., S. Chen, S. Eshelman, and D. Deniston, Micromachined low-loss microwave switches, IEEE J. Microelectromech. Syst., 8, No. 2, 129-1, 34, 1999.
    • Yao, Z. J., S. Chen, S. Eshelman, and D. Deniston, "Micromachined low-loss microwave switches," IEEE J. Microelectromech. Syst., Vol. 8, No. 2, 129-1, 34, 1999.
  • 4
    • 0034430165 scopus 로고    scopus 로고
    • A low-voltage actuated micromachined microwave switch using torsion springs and leverage
    • Hah, D. and E. Yoon, "A low-voltage actuated micromachined microwave switch using torsion springs and leverage," IEEE Transaction on Microwave Theory and Techniques, Vol. 48, No. 12, 2540-2545, 2000.
    • (2000) IEEE Transaction on Microwave Theory and Techniques , vol.48 , Issue.12 , pp. 2540-2545
    • Hah, D.1    Yoon, E.2
  • 5
    • 0035280569 scopus 로고    scopus 로고
    • Monolithically integrated micromachined RF MEMS capacitive switches
    • Park, J. Y., G. H. Kim, K. W. Chung, and J. U. Bu, "Monolithically integrated micromachined RF MEMS capacitive switches," Sensors and. Actuators A, Vol. 89, 88-94, 2001.
    • (2001) Sensors and. Actuators A , vol.89 , pp. 88-94
    • Park, J.Y.1    Kim, G.H.2    Chung, K.W.3    Bu, J.U.4
  • 8
  • 9
    • 33947109229 scopus 로고    scopus 로고
    • Tilmans, H. A. C., E. Fullin, H. Ziad, and M. D. J. Van De Peer, A fully-packaged electromagnetic microrelay, MEMS'99, 17-21, Orlando, Florida, USA, 1999.
    • Tilmans, H. A. C., E. Fullin, H. Ziad, and M. D. J. Van De Peer, "A fully-packaged electromagnetic microrelay," MEMS'99, 17-21, Orlando, Florida, USA, 1999.
  • 10
    • 31144467141 scopus 로고    scopus 로고
    • On improving impedance matching of a CPW fed low permittivity dielectric resonator antenna
    • Rao, Q. and T. A. Denidni, "On improving impedance matching of a CPW fed low permittivity dielectric resonator antenna," Progress In Electromagnetics Research, PIER 53, 21-29, 2005.
    • (2005) Progress In Electromagnetics Research, PIER , vol.53 , pp. 21-29
    • Rao, Q.1    Denidni, T.A.2
  • 12
    • 0242468201 scopus 로고    scopus 로고
    • Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles
    • October
    • Chan, R., R. Lesnick, D. Becher, and M. Feng, "Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles," IEEE J.Microelectromech. Syst., Vol. 12, No. 5, 713-719, October 2003.
    • (2003) IEEE J.Microelectromech. Syst , vol.12 , Issue.5 , pp. 713-719
    • Chan, R.1    Lesnick, R.2    Becher, D.3    Feng, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.