K-band capacitive MEMS-switches

2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

Volumn , Issue , 2000, Pages 119-122

  Ulm, M ^a   Walter, T ^a   Mueller Fiedler, R ^a   Voigtlaender, K ^a   Kasper, E ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; INTEGRATED CIRCUITS; RECONFIGURABLE HARDWARE; SEMICONDUCTOR DEVICES; SILICON;

ACTUATION VOLTAGES; CAPACITIVE SWITCH; COPLANAR TRANSMISSION LINES; FABRICATION PROCESS; HIGH-RESISTIVITY SILICON SUBSTRATE; LOW INSERTION LOSS; MICRO-ELECTRO-MECHANICAL; RESONANCE FREQUENCIES;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 0002967975     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2000.844313     Document Type: Conference Paper

References (5)

1. E. R. Brown, "Rf-mems switches for reconfigurable integrated circuits," IEEE Transactions on Microwave Theory and Techniques, vol. 46, p. 1868, November 1998.
2. C. T.-C. Nguyen, "Communications applications of microelectromechanical systems," Proceedings of the 1998 Sensors Expo, May 1998.
3. S. P. Pacheco and L. P. B. Katehi, "Microelectromechanical k-band switching circuits," Proceedings of the 29th European Microwave Conference, vol. 2, p. 45, 1999.
4. K. Strohm, C. Rheinfelder, A. Schurr, and J. Luy, "Simmwic capacitive rf switches," IEEE MTT-S Digest, p. 411, October 1999.
5. C. Goldsmith, Z. Yao, S. Eshelman, and S. Denniston, "Performance of low-loss rf mems capacitive switches," IEEE Microwave and guided wave letters, vol. 8, p. 269, August 1998.