Nanocrystalline Ga1-xMnxN films grown by reactive sputtering

Journal of Crystal Growth

Volumn 294, Issue 2, 2006, Pages 309-314

  Leite, D M G ^a   da Silva, L F ^a   Pereira, A L J ^a   Dias da Silva, J H ^a  

^a SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

Author keywords

A3. Sputtering; B1. GaMnN; B1. Nanocrystalline materials; B2. Diluted magnetic semiconductor

Indexed keywords

CRYSTAL STRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; FILM GROWTH; GALLIUM COMPOUNDS; MAGNETRON SPUTTERING; REACTIVE SPUTTERING; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DILUTED MAGNETIC SEMICONDUCTORS; GAMNN; SINGLE CRYSTAL FILMS; WURTZITE STRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 33947113826     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.07.012     Document Type: Article

References (14)

1. Overberg M.E., Abernathy C.R., Pearton S.J., Theodoropoulou N.A., McCarthy K.T., and Hebard A.F. Appl. Phys. Lett. 79 9 (2001) 1312
2. Thaler G.T., et al. Appl. Phys. Lett. 80 21 (2002) 3964
3. Thaler G., Frazier R., Gila B., Stapleton J., Davidson M., Abernathy C.R., Pearton S.J., and Segre C. Appl. Phys. Lett. 84 8 (2004) 1314
4. Wolos A., Palczewska M., Zajac M., Gosk J., Kaminska M., Twardowski A., Bockowski M., Grzegory I., and Porowski S. Phys. Rev. B 69 (2004) 115210
5. Guo Q.X., Okada A., Kidera H., Tanaka T., Nishio M., and Ogawa H. J. Crystal Growth 237 (2002) 1079
6. Pereira A.L.J., Lopez J.V., and Dias da Silva J.H. Rev. Brasil. Aplicações de Vácuo 22 2 (2003) 50
7. D.M.G. Leite, A.L.J. Pereira, L.F. da Silva, J.H. Dias da Silva, Brazil. J. Phys. 36(3) (2006), to be published.
8. Cullity B.D., and Stock S.R. Elements of X-ray Diffraction. third ed (2001), Prentice-Hall Inc., Englewood Cliffs, NJ p. 167
9. Wright A.F., and Nelson J.S. Phys. Rev. B 51 12 (1995) 7866
10. Sigmund P. Phys. Rev. 184 2 (1969) 383
11. Smith D.L. Thin-Film Deposition (1995), McGraw Hill, Boston p. 139
12. Kikuma T., Tominaga K., Furutani K., Kusaka K., Hanabusa T., and Mukai T. Vacuum 66 (2002) 233
13. Kusaka K., Hanabusa T., Tominaga K., and Yamauchi N. J. Vac. Sci. Technol. A 22 4 (2004) 1587
14. Denton A.R., and Ashcroft N.W. Phys. Rev. B 43 6 (1991) 3161