Frequency domain reflectometry of plasma chambers

Vacuum

Volumn 81, Issue 8, 2007, Pages 958-968

  Law, V J ^a   Macgearailt, N ^b   Cunningham, P ^b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b Intel Ireland Ltd   (Ireland)

Author keywords

Classification; Fault detection; Plasma tool diagnostic

Indexed keywords

CAPACITANCE; FAULT DETECTION; FREQUENCY DOMAIN ANALYSIS; FREQUENCY RESPONSE; SPECTRUM ANALYZERS;

INDUSTRIAL PLASMA CHAMBERS; PLASMA TOOL DIAGNOSTIC; RADIO FREQUENCY RESISTIVE LOSS; SCALAR NETWORK ANALYZER (SNA);

REFLECTOMETERS;

EID: 33947104520     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.11.004     Document Type: Article

References (17)

1. Vanhamme H. IEEE Instrum Meas 39 2 (1990) 369
2. Shin Y.-J., Powers E.J., Choe T., Hong C., Song E., Yook J., et al. IEEE TransInstrum Meas 54 6 (2005) 2493
3. Law V.J., Kenyon A.J., Clary D.C., and Batty I.J. Appl Phys 86 8 (1999) 4100
4. The proceeding of the seventh European advanced equipment control/advanced process control 28-31 March 2006, Aix-en-Provence. France. Poster 207. CD-rom published by the European AEC/APC Steering Committee. 〈http://www.aecapc-europe.com〉.
5. Law V.J., Kenyon A.J., Thornhill N.F., Pagliarani A., Lea L., and Watkins M. Meas Sci Technol 15 (2004) 231
6. Hitachi High Technologies America, Inc. 〈http://www.hitachi-hta.com〉.
7. Ji Z., Li H.H., Li Q., and Wu Q.H. Electron Lett 41 7 (2005) 440
8. Law V.J., and Macgearailt N. Electron Lett 42 1 (2006) 57
9. Karkari S, Law VJ, Ellingboe AR, Proceedings of XXV1th ICPIG. Eindhoven. the Netherlands, 2005. Poster session 3: no 44. 21 July 2005.
10. Piejack R.B., Al-Kuzee J., and Braithwaite N.St.J. Plas Scou Sci Technol 14 (2005) 734
11. Vasekova E, Al-Kuzee J, Braithwaite NStJ. Private communication, The Open University.
12. Dunwoodie DE, Lacy P, Why tolerate unnecessary measurement errors. Wiltron Techn Rev 1975:1.
13. Information on the Lam Research Corporation Rainbow™ series can be found at 〈http://www.lamrc.com〉.
14. Miranda A.J., and Spanos C.J. J Vac Sci Tecnol 14 3 (1996) 1888
15. In this work the Analyser III, Linear Analogue Circuit Simulator programme 〈http://www.numberone.com〉 was used. Other Linear Analogue Circuit software programmes may also be.
16. Information on Tokyo Electron Telius™ can be found at 〈http://telusa.com〉.
17. Information on the STS-plc ASE™ can be found at 〈http://www.stsystems.com〉.