A frequency domain measurement diagnostic technique for plasma-tools

Measurement Science and Technology

Volumn 15, Issue 1, 2004, Pages 231-236

  Law, V J ^a   Kenyon, A J ^a   Thornhill, N F ^a   Pagliarani, A ^a   Lea, L ^b   Watkins, M ^b  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b Surface Technology Systems plc   (United Kingdom)

Author keywords

Fault detection; Plasma tool diagnostics; VHF frequency

Indexed keywords

ELECTRODES; FREQUENCY DOMAIN ANALYSIS; INDUCTIVELY COUPLED PLASMA; PLASMA DIAGNOSTICS; SILICON WAFERS; SPECTRUM ANALYZERS;

ELECTRO-MECHANICAL COMPONENTS;

MEASUREMENT THEORY;

MEASUREMENT METHOD;

EID: 0742270134     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/1/033     Document Type: Article

References (7)

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7. Hagen J B (ed) 1999 Radio-Frequency Electronics: Circuits and Applications (Cambridge: Cambridge University Press)