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Volumn 33, Issue 4, 2007, Pages 675-680

Enhancement of direct nitridation of silicon by common metals in silicon nitride processing

Author keywords

A. Powders: chemical preparation; Catalyst; D. Si3N4; Direct nitridation

Indexed keywords

CATALYSTS; IMPREGNATION; METALS; NITRIDATION; POWDERS; SILICON;

EID: 33947101608     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2005.12.004     Document Type: Article
Times cited : (35)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.