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Volumn 33, Issue 4, 2007, Pages 675-680
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Enhancement of direct nitridation of silicon by common metals in silicon nitride processing
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Author keywords
A. Powders: chemical preparation; Catalyst; D. Si3N4; Direct nitridation
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Indexed keywords
CATALYSTS;
IMPREGNATION;
METALS;
NITRIDATION;
POWDERS;
SILICON;
DIRECT NITRIDATION;
SI3N4;
SILICON GRANULES;
TUBULAR FLOW REACTOR;
SILICON NITRIDE;
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EID: 33947101608
PISSN: 02728842
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ceramint.2005.12.004 Document Type: Article |
Times cited : (35)
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References (25)
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